Real-time thermal model of chemical mechanical polishing

著录项

• 来源
  《Recent researches in mechanics》|2011年|p.114-119|共6页
• 会议地点 Corfu Island(GR);Corfu Island(GR);Corfu Island(GR);Corfu Island(GR);Corfu Island(GR);Corfu Island(GR);Corfu Island(GR);Corfu Island(GR)
• 作者

  Hsien-Chang Shih; Sheam-Chyun Lin; Chao-Chang Chen; Zong-Ching Lin;

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• 作者单位

  Department of Mechanical Engineering, National Taiwan University of Science and Technology, Taipei, Taiwan;

  Department of Mechanical Engineering, National Taiwan University of Science and Technology, Taipei, Taiwan;

  Department of Mechanical Engineering, National Taiwan University of Science and Technology, Taipei, Taiwan;

  Department of Mechanical Engineering, National Taiwan University of Science and Technology, Taipei, Taiwan;

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• 会议组织
• 原文格式 PDF
• 正文语种 eng
• 中图分类 机械制造工艺;
• 关键词

  control-oriented thermal management model; chemical mechanical polishing; slurry temperature;

  机译：面向控制的热管理模型；化学机械抛光；浆料温度;