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Bipolar conduction across a wafer bonded p-n Si/SiC heterojunction

机译:跨晶圆键合的p-n Si / SiC异质结的双极传导

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This paper describes the physical and electrical properties of a p-n Si/on-axis SiC vertical heterojunction rectifier. A thin 400nm p-type silicon layer was wafer-bonded to a commercial on-axis SiC substrate by room temperature hydrophilic wafer bonding. Transmission electron microscopy was used to identify the crystallographic orientation as (0001 )_(SiC)//(001 )_(Si) and to reveal an amorphous interfacial layer. Electrical tests performed on the p-n heterodiodes revealed that, after an additional 1000℃ anneal, the rectifier exhibits a remarkably low leakage current (lOnA/cm~2 at an anode voltage of V_A=-6V), improved on-resistance due to bipolar injection and a turn-on voltage close to the p-n heterojunction theoretical value of 2.24V.
机译:本文介绍了p-n Si /同轴SiC垂直异质结整流器的物理和电学特性。通过室温亲水性晶片键合将薄的400nm p型硅层晶片键合到市售同轴SiC衬底上。用透射电子显微镜鉴定晶体取向为(0001)_(SiC)//(001)_(Si)并揭示非晶界面层。对pn异质二极管进行的电气测试表明,在额外的1000℃退火之后,整流器显示出极低的漏电流(在阳极电压V_A = -6V时为lOnA / cm〜2),由于双极注入而提高了导通电阻导通电压接近pn异质结理论值2.24V。

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