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Epitaxial zirconia films on sapphire substrates

机译:蓝宝石衬底上的外延氧化锆膜

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摘要

The epitaxial development of undoped zirconia films produced via the solution precursor route and deposited by dip-coating on (1120) planes of sapphire is investigated. After drying and firing at 600 deg C, polycrystalline films are made of nanosized randomly oriented tetragonal ZrO_2 grains. Firing at higher temperatures promotes grain growth and islanding, so producing a layer of heteroepitaxial but isolated grains. Two families of single crystalline islands are identified: {100}_(tZrO2)//(1120)_(sapphire) and {111}_(tZrO2)//(1120)_(sapphire). In-plane growth of flat P100} oriented crystals can be favored by varying the thickness and firing conditions of the films. The heteroepitaxial orientation of the pseudo single crystalline film and the interface structure are examined through X-ray diffraction experiments (low incidence XRD, #omega#-rocking curves) and cross sectional HRTEM observations.
机译:研究了通过溶液前体路线生产并通过浸涂在蓝宝石的(1120)平面上沉积的未掺杂氧化锆薄膜的外延显影。干燥并在600摄氏度下烧制后,多晶薄膜由纳米尺寸的随机取向的四方ZrO_2晶粒制成。在较高温度下燃烧会促进晶粒的生长和孤岛化,因此会产生一层异质外延但孤立的晶粒。识别出两个单晶岛族:{100} _(tZrO2)//(1120)_(蓝宝石)和{111} _(tZrO2)//(1120)_(蓝宝石)。通过改变膜的厚度和焙烧条件,可以促进平面P100}取向晶体的面内生长。伪单晶膜的异质外延取向和界面结构通过X射线衍射实验(低入射XRD,ω-摇摆曲线)和横截面HRTEM观察进行了检查。

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