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首页> 外文会议>Unconventional imaging, wavefront sensing, and adaptive coded aperture imaging and non-imaging sensor systems >Shack-Hartmann wavefront sensor with high sensitivity by using long focal length microlens array
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Shack-Hartmann wavefront sensor with high sensitivity by using long focal length microlens array

机译：使用长焦距微透镜阵列的Shack-Hartmann波前传感器具有高灵敏度

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摘要

The performance of Shack-Hartmann wavefront sensor (SHWFS) is mainly described by the accuracy, spatial resolution, dynamic range, and sensitivity of the measurement. These factors are particularly affected by the design of the microlens array (MLA). In order to provide a large dynamic range of wavefront measurement, most of the conventional and commercial SHWFS implemented a short focal length lenslet array, which means that the measurement sensitivity is being sacrificed and the accuracy of the wavefront sensor will be degraded. However, it is also critical to detect very small displacement of SHWFS spot in order to reconstruct it into a fine wavefront variation. We fabricated long focal length MLA with various structure arrangement by thermal reflow process with Polydimethysiloxane (PDMS) cover on the glass substrate and implemented them on the image system. A longer focal length will provide high sensitivity in determining the average slope across each lenslet under a given wavefront, and the spatial resolution of the wavefront sensor is increased by the number of lenslets across the detector. The experimental setup consists of the fabricated 245 μm diameter MLA which provides a 5.2 mm long focal distance and is paired with the CMOS as the detector. The observable smallest sensitivity is around wavelength/20 (λ=630nm).
机译：Shack-Hartmann波前传感器（SHWFS）的性能主要由测量的准确性，空间分辨率，动态范围和灵敏度来描述。这些因素特别受微透镜阵列（MLA）设计的影响。为了提供大的波前测量动态范围，大多数常规和商用SHWFS都采用了短焦距小透镜阵列，这意味着牺牲了测量灵敏度，并且波前传感器的精度将降低。但是，检测SHWFS光斑的很小位移以将其重建为精细的波前变化也是至关重要的。我们在玻璃基板上通过聚二甲基硅氧烷（PDMS）覆盖层通过热回流工艺制造了具有各种结构布置的长焦距MLA，并将其实现在图像系统上。较长的焦距将在确定给定波前下每个小透镜的平均斜率时提供高灵敏度，并且波前传感器的空间分辨率会增加整个检测器上的小透镜的数量。实验装置由制造的直径245μmMLA组成，其提供5.2 mm长的焦距，并与CMOS配对作为检测器。观察到的最小灵敏度约为波长/ 20（λ= 630nm）。

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