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Modular multi-scale assembly system for MEMS packaging.

机译：用于MEMS封装的模块化多尺度组装系统。

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摘要

A multi-scale robotic assembly problem is approached here with focus on mechanical design for precision positioning at the microscale. The assembly system is characterized in terms of accuracy/repeatability and calibration via experiments. The MEMS packaging requirements are studied from an assembly point of view. The tolerance budget of the assembly ranges from 4 microns to 300 microns. The system components include robots, microstages, end-effectors and fixtures that accomplish the assembly tasks. Task assignment amongst this hardware has been accomplished based on precision and dexterity availability. Various end-effectors and fixtures have been designed for use with off-the-shelf hardware (robots and microstages) to develop a coarse-fine positioning system. These end-effector and fixture designs are tested for precision performance. The robots and the vision system are calibrated to an accuracy of 11 microns or less. Inverse kinematics solutions for one of the robots have been developed in order to position parts in the global coordinate frame. Conclusions have been drawn with regard to implementation of calibration, fixturing, visual servoing or a combination of these techniques to achieve assembly within the specified tolerance budget as required by the target application. End-effector performance is improved by tuning the PID gains of the controller such that tool oscillations are minimized.
机译：在此提出了多尺度机器人组装问题，重点是用于在微尺度上精确定位的机械设计。组装系统的特点是精度/可重复性以及通过实验进行校准。从组装的角度研究了MEMS封装要求。组件的公差预算范围为4微米至300微米。系统组件包括机器人，微型载物台，末端执行器和完成装配任务的固定装置。这些硬件之间的任务分配已基于精度和灵活性的可用性来完成。已经设计了各种末端执行器和固定装置，以与现成的硬件（机器人和微型载物台）一起使用，以开发粗精细定位系统。这些末端执行器和固定装置设计经过了精确性能测试。机器人和视觉系统的校准精度为11微米或更小。已经开发了其中一种机器人的逆运动学解决方案，以便将零件定位在全局坐标系中。关于校准，夹具，视觉伺服或这些技术的组合的实现已得出结论，以在目标应用要求的指定公差预算内实现组装。通过调节控制器的PID增益可以提高末端执行器的性能，从而最大程度地减少工具振动。

著录项

  • 作者

    Murthy, Rakesh.;

  • 作者单位

    The University of Texas at Arlington.;

  • 授予单位 The University of Texas at Arlington.;
  • 学科 Engineering Mechanical.
  • 学位 M.S.
  • 年度 2005
  • 页码 78 p.
  • 总页数 78
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 机械、仪表工业;
  • 关键词

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