In this paper, we designed and analyzed a Micro Electro Mechanical Systems (MEMS) thermal variable capacitor, which down capacitor plate was fixed on the substrate while the up plate was driven by a thermal micro actuator. The actuator was composed of cold and hot arms, which one side ends were fixed on the substrate and other ends were connected to the up plate of MEMS capacitor. The actuator moved up and down with the input electrical voltage. The displacement and temperature of the capacitor with different hot arm length from 150μm to 300μm and different drive voltage from 0 to 4 V were calculated by Finite Element Analysis (FEA) method. The FEA results show that the max tuning ratio of capacitance can reach 10.%文中设计并分析了一个MEMS热驱动可变电容，它的下极板固定于衬底，上极板通过热致动器驱动。热致动器由冷臂和热臂组成，一端通过锚点固定于衬底，一端连接在电容器上极板。热驱动器通过电压驱动使MEMS电容器上极板上下运动。文中作者使用有限元方法模拟了150~300μm加热臂长在0~4 V电压条件下的电容变化值和温度变化，有限元模拟结果表明其电容变化率最大可达10倍。
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