In order to improve the quantitative analysis accuracy of AES ,We associated XPS with AES and studied the method to reduce the error of AES quantitative analysis ,selected Pt-Co ,Cu-Au and Cu-Ag binary alloy thin-films as the samples ,used XPS to correct AES quantitative analysis results by changing the auger sensitivity factors to make their quantitative analysis re-sults more similar .Then we verified the accuracy of the quantitative analysis of AES when using the revised sensitivity factors by other samples with different composition ratio ,and the results showed that the corrected relative sensitivity factors can reduce the error in quantitative analysis of AES to less than 10% .Peak defining is difficult in the form of the integral spectrum of AES analysis since choosing the starting point and ending point when determining the characteristic auger peak intensity area with great uncertainty ,and to make analysis easier ,we also processed data in the form of the differential spectrum ,made quantitative analysis on the basis of peak to peak height instead of peak area ,corrected the relative sensitivity factors ,and verified the accura-cy of quantitative analysis by the other samples with different composition ratio .The result showed that the analytical error in quantitative analysis of AES reduced to less than 9% .It showed that the accuracy of AES quantitative analysis can be highly im-proved by the way of associating XPS with AES to correct the auger sensitivity factors since the matrix effects are taken into ac-count .Good consistency was presented ,proving the feasibility of this method .%俄歇电子能谱（A ES ）在表面微区元素分析方面优势明显，但是受基体效应的影响，其定量分析，特别是非单质材料表面元素含量分析的准确度差，X射线光电子能谱（XPS）的定量分析准确度较高。为了降低AES定量分析的误差，将XPS和AES两种分析技术联用，选择Pt-Co ，Cu-Au和Cu-Ag三种二元合金样品进行了研究，利用样品的XPS定量分析结果对AES的定量分析所用相对灵敏度因子进行修正，将修正后的相对灵敏度因子用于其他不同组分比的样品的定量分析，以验证其分析准确性。结果表明，修正后的灵敏度因子在用于A ES定量分析时相对误差明显降低，分析相对误差小于10％。为了解决A ES定量分析在积分谱处理形式下选峰困难的问题，将积分谱进行微分化处理，并修正了微分谱的处理形式下的相对灵敏度因子，A ES的定量分析相对误差降低到小于9％，表明在两种处理形式下都能得到较为准确的定量结果。修正后的相对灵敏度因子包含了基体效应尤其是背散射效应的影响，从而有助于降低A ES定量分析的误差。说明借助XPS提高AES定量分析准确度的研究方法具有一定的可行性。
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