Limits to Nanopatterning of Fluids on Surfaces in Soft Lithography

Jens A. Wigenius; Mahiar Hamedi; Olle Inganaes

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Limits to Nanopatterning of Fluids on Surfaces in Soft Lithography

机译：软光刻中对流体在表面进行纳米构图的限制

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Soft lithographic microcontact printing using the residual polydimethylsiloxane (PDMS) found in elastomeric PDMS stamps is demonstrated to lead to unstable prints with sub-micrometer dimensions. The statics and dynamics of the process have been followed with time-resolved atomic force microscopy, imaging ellipsometry, water contact angle measurement, and optical diffraction. It is proposed that this instability places a fundamental limitation on patterning by macromolecular fluids, which is of general relevance to soft lithography and nanoimprint lithography with low viscosity polymers.

机译：使用在弹性PDMS压模中发现的残留聚二甲基硅氧烷（PDMS）的软光刻微接触印刷被证明会导致亚微米尺寸的不稳定印刷。时间分辨的原子力显微镜，椭偏成像，水接触角测量和光学衍射都跟踪了该过程的静态和动态。提出这种不稳定性对通过大分子流体进行的图案形成了基本的限制，这与具有低粘度聚合物的软光刻和纳米压印光刻通常相关。

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《Advanced Functional Materials》 |2008年第17期|p.2563-2571|共9页
作者
Jens A. Wigenius; Mahiar Hamedi; Olle Inganaes;
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作者单位

IFM, Linkoeping University s.e.-581 83 Linkoping (Sweden);

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正文语种 eng
中图分类无线电电子学、电信技术;
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2. Nanopatterning of PMMA on insulating surfaces with various anticharging schemes using 30 keV electron beam lithography [J] . Mustafa Muhammad, Steven C. Buswell, Steven K. Dew, Journal of Vacuum Science & Technology . 2011,第6期

机译：使用30 keV电子束光刻技术以各种反电荷方案在绝缘表面上对PMMA进行纳米图案化
3. Combining Micelle Self-Assembly with Nanostencil Lithography to Create Periodic/Aperiodic Micro-/Nanopatterns on Surfaces [J] . Sivashankar Krishnamoorthy, Marc Antonius Friedrich Van den Boogaart, Juergen Brugger, Advanced Materials . 2008,第18期

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4. Nanopatterning of silica sol-gel thin films by soft thermal nanoimprint lithography [C] . C.Peroz, C. Heitz, V. Goletto, Nano Science and Technology Institute(NSTI) Nanotechnology Conference and Trade Show(NSTI Nanotech 2007) vol.4; 20070520-24; Santa Clara,CA(US) . 2007

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5. Soft lithography for applications in microfluidic thermometry, isoelectric focusing, and micromixers. [D] . Samy, Razim Farid. 2008

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6. Microfluidic Neural Devices: 3D‐Printed Soft Lithography for Complex Compartmentalized Microfluidic Neural Devices (Adv. Sci. 16/2020) [O] . Janko Kajtez, Sebastian Buchmann, Shashank Vasudevan, 2020

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7. Fabrication of nanopatterns via surface chemical modification and reactive reversal nanoimprint lithography [O] . LI GUANGSHUO 2010

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Limits to Nanopatterning of Fluids on Surfaces in Soft Lithography

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