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Study of deposition parameters for the fabrication of ZnO thin films using femtosecond laser

机译：飞秒激光制备ZnO薄膜的沉积参数研究

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摘要

Femtosecond (fs) pulsed laser deposition (fs-PLD) of ZnO thin film on borosilicate glass substrates is reported in this work. The effect of important fs-PLD parameters such as target-substrate distance, laser pulse energy and substrate temperature on structure, morphology, optical transparency and luminescence of as-deposited films is discussed. XRD analysis reveals that all the films grown using the laser energy range 120-230 μJ are poly-crystalline when they are deposited at room temperature in a ~10~(-5)Torr vacuum. Introducing 0.7 m Torr oxygen pressure, the films show preferred c-axis growth and transform into a single-crystal-like film when the substrate temperature is increased to 100 ℃. The scanning electron micrographs show the presence of small nano-size grains at 25 ℃, which grow in size to the regular hexagonal shape particles at 100 ℃. Optical transmission of the ZnO film is found to increase with an increase in crystal quality. Maximum transmittance of 95 % in the wavelength range 400-1400 nm is achieved for films deposited at 100 ℃ employing a laser pulse energy of 180 μJ. The luminescence spectra show a strong UV emission band peaked at 377 nm close to the ZnO band gap. The shallow donor defects increase at higher pulse energies and higher substrate temperatures, which give rise to violet-blue luminescence. The results indicate that nano-crystalline ZnO thin films with high crystalline quality and optical transparency can be fabricated by using pulses from fs lasers.
机译：在这项工作中报道了飞秒（fs）脉冲激光沉积（fs-PLD）的ZnO薄膜在硼硅酸盐玻璃基板上。讨论了重要的fs-PLD参数（例如目标衬底距离，激光脉冲能量和衬底温度）对沉积膜的结构，形态，光学透明性和发光的影响。 XRD分析表明，在室温下以〜10〜（-5）Torr真空沉积时，使用120-230μJ激光能量生长的所有膜均为多晶。引入0.7 m Torr的氧气压力，该膜表现出优选的c轴生长，并且当基板温度升至100℃时转变为单晶状膜。扫描电子显微镜照片显示，在25℃时存在纳米尺寸的小晶粒，在100℃时尺寸增长为规则的六边形颗粒。发现ZnO膜的透光率随着晶体质量的增加而增加。使用180μJ的激光脉冲能量，在100℃沉积的薄膜在400-1400 nm的波长范围内可获得95％的最大透射率。发光光谱显示在靠近ZnO带隙的377 nm处达到峰值的强UV发射带。浅的施主缺陷在较高的脉冲能量和较高的基板温度下会增加，从而导致紫蓝色发光。结果表明，通过使用fs激光器的脉冲可以制备具有高结晶质量和光学透明性的纳米ZnO薄膜。

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  • 来源
    《Applied Physics》 |2016年第8期|763.1-763.10|共10页
  • 作者

    Jaweria Zartaj Hashmi; Khurram Siraj; Anwar Latif; Mathew Murray; Gin Jose;

  • 作者单位

    Department of Physics, Laser and Optronics Centre, University of Engineering and Technology, Lahore 54890, Pakistan,Applied Photon Science, School of Chemical and Process Engineering, University of Leeds, Leeds LS2 9JT, UK;

    Department of Physics, Laser and Optronics Centre, University of Engineering and Technology, Lahore 54890, Pakistan;

    Department of Physics, Laser and Optronics Centre, University of Engineering and Technology, Lahore 54890, Pakistan;

    Applied Photon Science, School of Chemical and Process Engineering, University of Leeds, Leeds LS2 9JT, UK;

    Applied Photon Science, School of Chemical and Process Engineering, University of Leeds, Leeds LS2 9JT, UK;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
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