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Replication of mold for UV-nanoimprint lithography using AAO membrane

机译：使用AAO膜复制用于UV-纳米压印光刻的模具

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摘要

A simple and highly effective method to the replication of soft mold based on the anodic aluminum oxide (AAO) membrane was developed. The soft mold with nanopillar arrays was composed of the toluene diluted PDMS layer supported by the soft PDMS. A water contact angle as high as 114° was achieved. The hexagonally well-order arrays of holes of nanometer dimensions, ～100 nm pore diameter and 125 nm center-to-center pore, could be gained over large areas by UV-nanoimprint lithography (UV-NIL) with the replicated soft PDMS mold. It is expected that the developed soft mold would find applications in light emitting diodes devices.
机译：开发了一种简单高效的基于阳极氧化铝膜的软模复制方法。具有纳米柱阵列的软模具由被软PDMS支撑的甲苯稀释的PDMS层组成。获得了高达114°的水接触角。通过使用复制的软PDMS模具进行UV-纳米压印光刻（UV-NIL），可以在大面积上获得纳米尺寸，孔径约为100 nm和中心距中心孔径为125 nm的六边形井眼排列。期望开发的软模将在发光二极管器件中找到应用。

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  • 来源
    《Applied Surface Science》 |2009年第18期|8019-8022|共4页
  • 作者

    Weimin Zhou; Jing Zhang; Xiaoli Li; Yanbo Liu; Guoquan Min; Zhitang Song; Jianping Zhang;

  • 作者单位

    Laboratory of Nanotechnology, Shanghai Nanotechnology Promotion Center (SNPC), Shanghai 200237, China State Key Laboratory of Functional Materials for Informatics, Laboratory of Nanotechnology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China;

    Laboratory of Nanotechnology, Shanghai Nanotechnology Promotion Center (SNPC), Shanghai 200237, China;

    Laboratory of Nanotechnology, Shanghai Nanotechnology Promotion Center (SNPC), Shanghai 200237, China;

    Laboratory of Nanotechnology, Shanghai Nanotechnology Promotion Center (SNPC), Shanghai 200237, China State Key Laboratory of Functional Materials for Informatics, Laboratory of Nanotechnology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China;

    Laboratory of Nanotechnology, Shanghai Nanotechnology Promotion Center (SNPC), Shanghai 200237, China;

    State Key Laboratory of Functional Materials for Informatics, Laboratory of Nanotechnology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China;

    Laboratory of Nanotechnology, Shanghai Nanotechnology Promotion Center (SNPC), Shanghai 200237, China State Key Laboratory of Functional Materials for Informatics, Laboratory of Nanotechnology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    AAO membrane; soft lithography; UV-nanoimprint lithography;

    机译：AAO膜软光刻紫外纳米压印光刻;

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