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Feasibility of integrated optical isolator with semiconductor guiding layer fabricated by wafer direct bonding

机译:集成光隔离器与通过晶片直接键合制造的半导体导引层的可行性

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摘要

An integrated optical isolator, employing a nonreciprocal phase shift, fabricated by wafer direct bonding technique is proposed. The optical isolator has an optical interferometer, which is composed of two tapered couplers, nonreciprocal phase shifters in two arms and a reciprocal phase shifter in one of the arms. The magneto-optic waveguide in the nonreciprocal phase shifter has a magnetic garnet-GaInAsP-InP structure, which is realised by the direct bonding technique. The theoretical and experimental results of the components for the isolator are demonstrated to investigate the feasibility of this device.
机译:提出了一种通过单片直接键合技术制造的采用不可逆相移的集成光隔离器。光学隔离器具有一个光学干涉仪,该干涉仪由两个锥形耦合器,两个臂中的不可逆移相器和一个臂中的可逆移相器组成。不可逆移相器中的磁光波导具有磁性石榴石-GaInAsP-InP结构,该结构通过直接键合技术实现。证明了隔离器组件的理论和实验结果,以研究该装置的可行性。

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