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首页> 外文期刊>IEEE transactions on nanotechnology >Analysis of Dynamic Pressure Distribution on the Mold in Compressional Gas Cushion Press Nanoimprint Lithography
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Analysis of Dynamic Pressure Distribution on the Mold in Compressional Gas Cushion Press Nanoimprint Lithography

机译：压缩气垫式纳米压印光刻中模具动态压力分布分析

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摘要

Air cushion press (ACP) is one of the significant approaches to improve the uniformity of pressure distribution. It is important to point out that the pressing method through piston compressing gas proposed in this paper is the further development of air cushion press (ACP) in nanoimprint lithography (NIL). In this novel method, a servomotor drives a piston to compress gas in the closed chamber. The increasing gas pressure can be distributed on the mold and substrate uniformly. The dynamic pressing processes of both air inflation via jet nozzles and compressing gas through piston have been simulated and analyzed by using the FEM software Comsol Multiphysics with computational fluid dynamics (CFD) method. The analysis of the results of the CFD simulation shows that the distribution of pressure on the patterned mold is more uniform during the gas-compressing process, which is favorable for transferring the feature patterns on the mold with high fidelity and prolonging the life of mold due to the reduction of the mold loss.
机译：气垫压力机（ACP）是提高压力分布均匀性的重要方法之一。重要的是要指出，本文提出的通过活塞压缩气体的加压方法是纳米压印光刻（NIL）中气垫压力机（ACP）的进一步发展。在这种新颖的方法中，伺服电动机驱动活塞以压缩密闭腔室内的气体。不断增加的气压可以均匀地分布在模具和基板上。使用FEM软件Comsol Multiphysics结合计算流体动力学（CFD）方法，对通过喷嘴充气和通过活塞压缩气体的动态加压过程进行了仿真和分析。对CFD模拟结果的分析表明，在气体压缩过程中，图案化模具上的压力分布更加均匀，这有利于高保真度地转移模具上的特征图案并延长模具寿命。以减少模具损失。

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