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Source Side Injection Programmed P-Channel Self-Aligned-Nitride One-Time Programming Cell for 90 nm Logic Nonvolatile Memory Applications

机译:用于90 nm逻辑非易失性存储器应用的源极侧注入编程P沟道自对准氮化物一次性编程单元

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摘要

This study demonstrates a logic compatible p-channel self-Aligned-nitride (SAN) cell for one-time programming (OTP) memory applications. The SAN storage structure is independent of the gate oxide thickness, allowing these cells to be performed in a pure advanced logic process beyond 90 nm. The study also exams the characteristics of the source-side injection hot electron (SSIHE) scheme using the simulation tools, and successfully verified the programming characteristics of the p-channel SAN cell with different program voltages. Moreover, this study shows the proposed SAN cell has a wide read current window, high reliability, and superior immunity to disturbance. Combined with a source-side injection scheme, this cell provides a promising solution for advanced logic nonvolatile memory (NVM) applications.
机译:这项研究演示了用于一次性编程(OTP)存储器应用的逻辑兼容p沟道自对准氮化物(SAN)单元。 SAN存储结构与栅极氧化物的厚度无关,从而允许这些单元以超过90 nm的纯高级逻辑工艺执行。该研究还使用仿真工具检查了源侧注入热电子(SSIHE)方案的特性,并成功验证了具有不同编程电压的p沟道SAN单元的编程特性。此外,这项研究表明,所提出的SAN单元具有宽的读取电流窗口,高可靠性和优异的抗扰性。结合源端注入方案,该单元为高级逻辑非易失性存储器(NVM)应用提供了有希望的解决方案。

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  • 来源
    《Japanese journal of applied physics》 |2010年第4issue2期|P.04DD05.1-04DD05.3|共3页
  • 作者单位

    Microelectronics Laboratory, STAR Group, Department of Electrical Engineering, National Tsing Hua University, Hsinchu, Taiwan 30013, R.O.C.;

    rnMicroelectronics Laboratory, STAR Group, Department of Electrical Engineering, National Tsing Hua University, Hsinchu, Taiwan 30013, R.O.C.;

    rnMicroelectronics Laboratory, STAR Group, Department of Electrical Engineering, National Tsing Hua University, Hsinchu, Taiwan 30013, R.O.C.;

    rnMicroelectronics Laboratory, STAR Group, Department of Electrical Engineering, National Tsing Hua University, Hsinchu, Taiwan 30013, R.O.C.;

    rnMicroelectronics Laboratory, STAR Group, Department of Electrical Engineering, National Tsing Hua University, Hsinchu, Taiwan 30013, R.O.C.;

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