Growth of Transparent Conductive Al-Doped ZnO Thin Films and Device Applications

Sang-Moo PARK; Tomoaki IKEGAMI; Kenji EBIHARA

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Growth of Transparent Conductive Al-Doped ZnO Thin Films and Device Applications

机译：透明导电掺铝ZnO薄膜的生长及其器件应用

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High-purity transparent conductive Al-doped ZnO (AZO) films were grown by KrF excimer pulsed laser deposition. We used ultraviolet and X-ray photoelectron spectroscopes to directly measure the absolute values of the vacuum work function of AZO films. The structure and electrical and optical properties of the as-grown AZO films were studied using X-ray diffraction, room temperature Hall effect measurement and spectro photometer, respectively. Finally, organic light emitting diodes (OLED) were fabricated on these AZO films. OLED device measurement showed that the current of the OLED with AZO was clearly increased. Our AZO thin films showed a higher conductivity (ρ = 1.33 x 10~(-4) Ωcm, R_s = 10.1 Ω/sq) than conventional indium tin oxide films.

机译：高纯透明导电掺杂铝的ZnO（AZO）薄膜通过KrF受激准分子脉冲激光沉积法生长。我们使用紫外线和X射线光电子能谱仪直接测量AZO膜的真空功函数的绝对值。使用X射线衍射，室温霍尔效应测量和分光光度计分别研究了成膜的AZO薄膜的结构，电学和光学性质。最后，在这些AZO膜上制造了有机发光二极管（OLED）。 OLED器件的测量表明，带有AZO的OLED的电流明显增加。我们的AZO薄膜显示出比常规铟锡氧化物薄膜更高的电导率（ρ= 1.33 x 10〜（-4）Ωcm，R_s = 10.1Ω/ sq）。

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来源
《Japanese Journal of Applied Physics. Part 1, Regular Papers, Brief Communications & Review Papers》 |2006年第10b期|p.8453-8456|共4页
作者
Sang-Moo PARK; Tomoaki IKEGAMI; Kenji EBIHARA;
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作者单位

Graduate School of Science and Technology and Department of Electrical and Computer Engineering, Kumamoto University, 2-39-1 Kurokami, Kumamoto 860-8555, Japan;

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原文格式 PDF
正文语种 eng
中图分类应用物理学;
关键词
Al-doped ZnO; transparent conductive oxide; work function; OLED; pulsed laser deposition;

机译：铝掺杂ZnO;透明导电氧化物;功函;OLED;脉冲激光沉积;

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1. Highly transparent and conductive Al-doped ZnO/Ag/Al-doped ZnO multilayer source/drain electrodes for transparent oxide thin film transistors [J] . Choi K.-H., Choi Y.-Y., Jeong J.-A., Electrochemical and solid-state letters . 2011,第4期

机译：用于透明氧化物薄膜晶体管的高透明导电Al掺杂ZnO / Ag / Al掺杂ZnO多层源/漏电极
2. The growth of transparent conductive Al-doped ZnO thin films at room temperature [J] . Sang-Moo Park, Takashi Tomemori, Tomoaki Ikegami, Diffusion and Defect Data. Solid State Data, Part B. Solid State Phenomena . 2007,第1期

机译：透明导电掺铝ZnO薄膜的室温生长
3. Surface microstructure evolution of highly transparent and conductive Al-doped ZnO thin films and its application in CIGS solar cells [J] . Cheng Ke, Liu Jingjing, Jin Ranran, Applied Surface Science . 2017,第jula1期

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4. The growth of transparent conductive Al-doped ZnO thin films at room temperature [C] . Sang-Moo Park, Takashi Tomemori, Tomoaki Ikegami, IUMRS International Conference in Asia . 2007

机译：在室温下透明导电Al掺杂ZnO薄膜的生长
5. Metal-organic chemical vapor deposition of indium oxide based transparent conducting oxide thin films: Precursor synthesis, film growth and characterization, and their application in polymer light-emitting diode devices. [D] . Ni, Jun. 2005

机译：氧化铟基透明导电氧化物薄膜的金属有机化学气相沉积：前体合成，膜生长和表征及其在聚合物发光二极管器件中的应用。
6. Growth and optical properties of ZnO nanorod arrays on Al-doped ZnO transparent conductive film [O] . Suanzhi Lin, Hailong Hu, Weifeng Zheng, 2013

机译：铝掺杂ZnO透明导电膜上ZnO纳米棒阵列的生长和光学性质
7. The growth of transparent conductive Al-doped ZnO thin films at room temperature [O] . Sang-moo Park, Takashi Tomemori, Tomoaki Ikegami, 2015

机译：室温下透明导电al掺杂ZnO薄膜的生长

Growth of Transparent Conductive Al-Doped ZnO Thin Films and Device Applications

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