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首页> 外文期刊>Journal of Materials Science. Materials in Electronics >Structural and electrical properties of perovskite ruthenate-based lead-free thick film resistors on alumina and LTCC
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Structural and electrical properties of perovskite ruthenate-based lead-free thick film resistors on alumina and LTCC

机译：氧化铝和LTCC上钙钛矿钌酸盐基无铅厚膜电阻的结构和电性能

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摘要

CaRuO_3 perovskite-based lead-free thick-film resistors (TFRs) were prepared on 96%-alumina and Low Temperature Co-fired Ceramic (LTCC) substrates. The microstructure evolution, possible interactions, and electrical properties of resistors were investigated. The hot and cold TCR values of all the resistors were measured in the temperature range (+20 to +120℃) and (+20 to -120℃), respectively. TFRs with 25% by vol. of CaRuO_3 on alumina exhibit a sheet resistance R_s = 5 kΩ/sq. with hot and cold TCR of 225 and 470 ppm/℃ respectively, whereas the same composition gives 1.2 kΩ/sq., 16.5 kΩ/sq. and 0.7 kΩ/sq. for co-fired, post-fired resistors on LTCC and buried resistors, respectively. The hot (HTCR) and cold (CTCR) values were evaluated; HTCR = 190 ppm/℃ and CTCR = 314 ppm/℃ were found for co-fired structures; HTCR = 216 ppm/℃ and CTCR = 205 ppm/℃ for post-fired samples and HTCR = 520 ppm/℃ and CTCR = 350 ppm/℃ for buried in LTCC structures.
机译：在96％氧化铝和低温共烧陶瓷（LTCC）基板上制备了基于CaRuO_3钙钛矿的无铅厚膜电阻器（TFR）。研究了电阻的微观结构演变，可能的相互作用和电性能。所有电阻的热和冷TCR值分别在（+20至+ 120℃）和（+20至-120℃）温度范围内测量。含25％（体积）的TFR。氧化铝上的CaRuO_3的表面电阻R_s = 5kΩ/ sq。冷热TCR分别为225和470 ppm /℃，而相同的成分分别为1.2kΩ/ sq。，16.5kΩ/ sq。和0.7kΩ/ sq。分别用于LTCC上的共烧，后烧电阻和掩埋电阻。评估了热（HTCR）和冷（CTCR）值；共烧结构的HTCR = 190 ppm /℃，CTCR = 314 ppm /℃。后烧制样品的HTCR = 216 ppm /℃和CTCR = 205 ppm /℃，埋在LTCC结构中的HTCR = 520 ppm /℃和CTCR = 350 ppm /℃。

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