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Technological and optical methods for increasing the spatial resolution of thermochemical laser writing on thin metal films

机译：用于提高金属薄膜上热化学激光写入的空间分辨率的技术和光学方法

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摘要

Various techniques, effects, and factors are examined that enable one to increase the spatial resolution of thermochemical direct laser writing on thin metal films. A few specific conditions of experimental laser processing with the focused beam of a CW green laser are investigated therewith. One of the goals of this work was to find a suitable metal and its thickness that would make it possible to implement the through-oxidation regime. When properly adjusting a value of laser exposure, this regime was found to be very useful for increasing the spatial resolution of the laser writing. This is due to bleaching of an oxidized film near the peak of a focused laser spot. Apart from the experimental results concerning the technology of laser processing of the metal films, in this work, there are also considered some ways of reducing a focused spot size used for the direct laser writing.
机译：研究了各种技术，效果和因素，使人们能够提高在金属薄膜上进行热化学直接激光写入的空间分辨率。据此研究了使用连续波绿色激光器的聚焦光束进行实验激光加工的一些特定条件。这项工作的目标之一是找到一种合适的金属及其厚度，从而有可能实施穿透氧化方案。当适当地调整激光曝光值时，发现该方案对于增加激光写入的空间分辨率非常有用。这是由于聚焦的激光斑的峰值附近的氧化膜的漂白。除了有关金属膜激光加工技术的实验结果外，在这项工作中，还考虑了一些减小用于直接激光写入的聚焦光斑尺寸的方法。

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