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首页> 外文期刊>Thin Solid Films >Realization of superhard chromium nitride-based films: A superlattice nanocrystalline-Cr_2N/amorphous-WC film
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Realization of superhard chromium nitride-based films: A superlattice nanocrystalline-Cr_2N/amorphous-WC film

机译:超硬氮化铬基膜的实现:超晶格纳米晶Cr_2N /非晶WC膜

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摘要

Generally, it is a challenge for superhard nitride films to possess strong enough fracture toughness. In the present study, a superhard nanocrystal- (nc-) Cr_2N/amorphous- (a-) WC film was fabricated by arc ion plating and dc magnetron sputtering. The superlattice structure of nc-Cr_2N with 9 nm thickness and a-WC with 3 nm thickness was alternately grown on amorphous Cr/WC buffer layer. Accordingly, the multilayers nc-Cr_2N/a-WC nanocomposite showed a superhardness effect (~40 GPa) which presents an anomalous enhancement of hardness and elastic modulus. The adhesion strength of nc-Cr_2N/a-WC multilayers on the steel substrate exceeded 60 N. The tribological behavior of the nc-Cr_2N/a-WC film was proven that the super-lattice nc-Cr_2N/a-WC nanocomposites have significant potential for high-speed dry machining and other wear-resistance precise parts.
机译:通常,超硬氮化物膜具有足够强的断裂韧性是一个挑战。在本研究中,通过电弧离子镀和直流磁控溅射制备了超硬纳米晶(nc-)Cr_2N /非晶-(a-)WC膜。在非晶Cr / WC缓冲层上交替生长了厚度为9 nm的nc-Cr_2N和厚度为3 nm的a-WC的超晶格结构。因此,多层nc-Cr_2N / a-WC纳米复合材料表现出超硬效应(〜40 GPa),异常增加了硬度和弹性模量。 nc-Cr_2N / a-WC多层膜在钢基底上的附着强度超过60N。nc-Cr_2N / a-WC膜的摩擦学行为证明超晶格nc-Cr_2N / a-WC纳米复合材料具有显着的力学性能。高速干式加工和其他耐磨精密零件的潜力。

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  • 来源
    《Thin Solid Films》 |2012年第15期|p.4984-4989|共6页
  • 作者单位

    School of Materials Science and Engineering, Anhui University of Technology, Maanshan City, Anhui Province, 243002, PR China;

    School of Materials Science and Engineering, Anhui University of Technology, Maanshan City, Anhui Province, 243002, PR China;

    School of Materials Science and Engineering, Anhui University of Technology, Maanshan City, Anhui Province, 243002, PR China;

    School of Materials Science and Engineering, Anhui University of Technology, Maanshan City, Anhui Province, 243002, PR China;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    superlattice; mechanical properties; tribological behavior; physical vapor deposition;

    机译:超晶格机械性能摩擦行为物理气相沉积;

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