【24h】

Fundamentals of nitride-based superlattice thin films

机译:基于氮化物的超晶格薄膜的基础

获取原文

摘要

the structure and mechanical properties of superlattices have been studied since the 1960's.[1] The term "superlattice" in this case refers to any thin-film structure with a periodic composition modulation in the film growth direction.Superlattices are characterized by the distance between successive pair of layers,A,known as the 'bilayer repeat period'.In early work,Hilliard and co-workers used superlattices such as Ag/Cu for interdiffusion studies,where the nm-scale thicknesses allowed measurement of relative small diffusion coefficients.Early work also showed unusually large hardnesses in metallic superlattices.Interest in superlattice mechanical properties blossomed in the late 1970's,with the first report of the so-called supermodulus effect - an anomalously large (2-5 times) enhancement in elastic moduli for small composition-modulation periods #LAMBDA# approx2nm.however,most recent reports show only minor (approx approx 10
机译:自1960年代以来,已经研究了超晶间的结构和机械性能。[1]在这种情况下,术语“超晶格”是指在膜生长方向上具有周期性组成调制的任何薄膜结构。upertartics的特征在于连续的一对层之间的距离,a,称为'双层重复周期'。早期的工作,希尔德和同事使用了超晶格,如AG / Cu进行交互研究,其中NM尺度厚度允许测量相对小的扩散系数。在金属超晶格中也表现出异常的大硬度。在凸起的超晶格机械性能下的互联网上的异常大的硬度在20世纪70年代后期,首次报告所谓的超模效应 - 一个异常大(2-5次)的弹性模态的增强,用于小型组成调制期#LAMBDA#约2nm。然而,最近的报告仅显示未成年人(约10

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号