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首页> 外文期刊>Thin Solid Films >Low-cost ZnO:AI transparent contact by reactive rotatable magnetron sputtering for Cu(In,Ga)Se_2 solar modules
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Low-cost ZnO:AI transparent contact by reactive rotatable magnetron sputtering for Cu(In,Ga)Se_2 solar modules

机译：反应性可旋转磁控溅射的低成本ZnO：Al透明接触，用于Cu（In，Ga）Se_2太阳能电池组件

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摘要

Sputtering ZnO as transparent front contact (TCO) is standard in today's industrial scale Cu(In,Ga)Se_2 (CIGS) module manufacturing. Although innovative concepts like rotatable magnetron sputtering from ceramic targets have been realised, costs are still high due to expensive ceramic targets. Significant cost reductions are expected by using reactive sputtering of metallic targets.Therefore, ZSW and industrial partners investigated the reactive sputtering of Al-doped zinc oxide (ZAO) as TCO on CIGS absorbers of high quality and industrial relevance. The reactive DC sputtering from rotatable magnetron targets is controlled in the transition mode by adjusting oxygen flow and discharge voltage. Optimisation leads to ZAO films with a TCO quality nearly comparable to standard films deposited by DC ceramic sputtering. Scanning electron microscopy. X-ray diffraction, and Hall analyses of the ZAO films are performed.Medium-size CIGS modules are coated with reactively sputtered ZAO, resulting in 12.8% module efficiency and surpassing the efficiency of the ceramic witness device. Cd-free buffered devices are also successfully coated with reactive TCO. Damp heat stability according to IEC61646 is met by all reactively sputtered devices.
机译：溅射ZnO作为透明正面触点（TCO）是当今工业规模的Cu（In，Ga）Se_2（CIGS）模块制造的标准配置。尽管已经实现了诸如从陶瓷靶进行可旋转磁控管溅射的创新概念，但是由于昂贵的陶瓷靶，成本仍然很高。预期通过使用金属靶材的反应溅射可以显着降低成本。因此，ZSW和工业合作伙伴研究了作为TCO的Al掺杂氧化锌（ZAO）在CIGS吸收剂上的高质量和工业实用性。通过调节氧气流量和放电电压，在过渡模式下控制了来自可旋转磁控管靶材的反应性直流溅射。通过优化，ZAO薄膜的TCO质量几乎可以与直流陶瓷溅射沉积的标准薄膜相媲美。扫描电子显微镜。对XAO进行X射线衍射和霍尔分析，对中型CIGS模块进行反应溅射的ZAO涂层，使模块效率达到12.8％，并超过了陶瓷见证装置的效率。无镉缓冲设备也已成功涂覆了活性TCO。所有反应溅射设备均符合IEC61646的潮湿热稳定性。

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  • 来源
    《Thin Solid Films》 |2011年第21期|p.7541-7544|共4页
  • 作者

    R. Menner; D. Hariskos; V. Linss; M. Powalla;

  • 作者单位

    Zentrum für Sonnenenergie-und Wasserstoff-Forschung, Baden-Württemberg (ZSW) Industriestr. 6, D-70565 Stuttgart, Germany;

    Zentrum für Sonnenenergie-und Wasserstoff-Forschung, Baden-Württemberg (ZSW) Industriestr. 6, D-70565 Stuttgart, Germany;

    VON ARDENNE Anlagentechnik GmbH, Plattieite 19/29, D-01324 Dresden, Germany;

    Zentrum für Sonnenenergie-und Wasserstoff-Forschung, Baden-Württemberg (ZSW) Industriestr. 6, D-70565 Stuttgart, Germany;

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  • 正文语种 eng
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  • 关键词

    ZnO-1; Sputtering-2; TCO Transparent Conducting Oxides-3; CIGS-4;

    机译：ZnO-1;溅射-2;TCO透明导电氧化物-3;CIGS-4;

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