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首页> 外文期刊>Chinese science bulletin >Deposition of diamond film on Si substrate with buckytube coating
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Deposition of diamond film on Si substrate with buckytube coating

机译：用buckytube涂层在Si衬底上沉积金刚石膜

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The research of diamond film growth with a process of hot filament chemical vapour deposition (HF-CVD) has been carried out for several years, and one of the main technical problems hindering the development of this technique is the lower growth ratecompared with those of other processes. Therefore, raising the rate of diamond growth becomes a key problem in the synthetic growth of diamond film. Fullerenes, such as C_(60), C_(70) and buckytube, are large molecules consisting of carbon atoms. In recent years, they can be fabricated in large quantity and used in diamond synthesis. But only a few reports are given about fullerenes used as coating in diamond growth in a process of CVD. In 1991, the first report was "presented abroad that with a C_(70)coating diamond films were synthesized successfully. And in 1992 with a C_(60) coating, the first successful report appeared at home.
机译：用热丝化学气相沉积（HF-CVD）工艺进行的金刚石膜生长研究已经进行了数年，阻碍该技术发展的主要技术问题之一是与其他方法相比，其较低的生长速度。流程。因此，提高金刚石生长速率成为金刚石膜合成生长中的关键问题。富勒烯，例如C_（60），C_（70）和buckytube，是由碳原子组成的大分子。近年来，它们可以被大量制造并用于金刚石合成。但是，仅有很少的报道报道在CVD工艺中用作钻石生长涂层的富勒烯。 1991年，第一份报告“在国外发表，成功合成了具有C_（70）涂层的金刚石薄膜。1992年，有C_（60）涂层的第一份成功报告出现在国内。

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