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首页> 外文期刊>Journal of Materials Engineering and Performance >Mechanical Properties of Borosilicate Glass Coated With Pure Aluminum by Sputtering
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Mechanical Properties of Borosilicate Glass Coated With Pure Aluminum by Sputtering

机译：溅射镀纯铝硼硅酸盐玻璃的力学性能

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摘要

Rnrosilicate glass was coated with pure aluminum by the radio frequency (RF) magnetron-sputtering method under various conditions. The mechanical properties of coated materials were investigated with respect to the sputtering conditions. The surface roughness (R_a) and porosity (p) measured on the coating ncreased when the initial temperature of the substrate (T_(si)) was increased. A positive correlation between K and n also was confirmed. The hardness of aluminum-coated material was measured by using a Vickers mirrnhardness tester The hardness was greater in materials processed at higher T_(si), although the hardness hardly depended on the RF output power, P_(RF). However, the hardness of materials coated under every onnrtitinn was inferior to that of the substrate glass. Strength tests of coated materials and the substrate also were conducted under three-point bending mode. The bending strength (sigma_(fm)) of the coated material decreased with increasing T_(si), although it was better than that of the substrate glass. A good correlation between sigma_(fm) and hardness was observed for coated materials, irrespective of the sputtering condition.
机译：在各种条件下，通过射频（RF）磁控溅射方法在纯硅酸铝玻璃上镀膜。关于溅射条件研究了涂覆材料的机械性能。当基底的初始温度（T_（si））升高时，在涂层上测得的表面粗糙度（R_a）和孔隙率（p）增加。还证实了K和n之间的正相关。铝涂层材料的硬度通过维氏硬度计进行测量。尽管硬度几乎不依赖于RF输出功率P_（RF），但在较高的T_（si）下加工的材料的硬度较高。但是，在每个孔底下涂覆的材料的硬度均低于基材玻璃的硬度。涂层材料和基材的强度测试也在三点弯曲模式下进行。涂层材料的弯曲强度（sigma_（fm））随T_（si）的增加而降低，尽管比基体玻璃更好。不论溅射条件如何，对于涂层材料，观察到sigma_（fm）与硬度之间的良好相关性。

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