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首页> 外文期刊>Journal of Non-Crystalline Solids: A Journal Devoted to Oxide, Halide, Chalcogenide and Metallic Glasses, Amorphous Semiconductors, Non-Crystalline Films, Glass-Ceramics and Glassy Composites >Metastable effects in silicon thin films: Atmospheric adsorption and light-induced degradation
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Metastable effects in silicon thin films: Atmospheric adsorption and light-induced degradation

机译：硅薄膜中的亚稳态效应：大气吸附和光致降解

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摘要

The effects of exposure to atmosphere (ageing) and light-soaking on coplanar dark- and photo-conductivity of silicon films of varying crystallinity are examined. Dark conductivity generally increases on ageing in films with significant amorphous fraction and decreases in largely crystalline films, and may be reversed by annealing under vacuum at 130 degrees C consistent with adsorption and desorption of atmospheric components. Thinner films are more strongly affected by ageing. Boron doping appears to compensate charge introduced by ageing, though there are disagreements in detail. In comparison with ageing, moderate light-soaking affects dark conductivity in transitional microcrystalline silicon films only slightly. Both processes change the majority carrier mu-tau product in line with shifts in Fermi level position. (c) 2006 Elsevier B.V. All rights reserved.
机译：研究了暴露于大气（老化）和光浸泡对不同结晶度的硅膜的共面暗和光电导性的影响。暗电导率通常会随着具有明显无定形部分的薄膜的老化而增加，而在大部分为晶体的薄膜中则下降，并且可以通过在130摄氏度的真空下退火来逆转，这与大气成分的吸附和解吸一致。较薄的薄膜受老化的影响更大。硼掺杂似乎可以补偿老化带来的电荷，尽管在细节上存在分歧。与老化相比，适度的光浸透仅轻微影响过渡微晶硅膜中的暗电导率。两种工艺都根据费米能级位置的变化来改变多数载体的mu-tau产物。 （c）2006 Elsevier B.V.保留所有权利。

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