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Structural, mechanical and opto-thermal properties of non-crystalline SbxOy thin films

机译:非晶SbxOy薄膜的结构,机械和光热特性

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摘要

Sb_xO_y oxides thin films have been prepared on glass substrates by a heat treatment of Sb thermal evaporated thin films in air atmosphere. X-ray diffraction analysis shows that the films annealed at Tr=550°C are well constituted of the Sb_2O_4 orthorhombic phase with elements oriented preferentially towards (004) direction. In the same way, from the optical transmission T(λ) and reflection R(λ) curves, the study of the absorption coefficient of these films versus incident energy revealed that the value of the band gap energy of Sb_2O_4 oxide is of the order of 3.9 eV. Mechanical and opto-thermal original investigations confirmed the annealing temperature-related enhancement of the fabricated layers.
机译:通过在空气气氛中对Sb热蒸发薄膜进行热处理,在玻璃基板上制备了Sb_xO_y氧化物薄膜。 X射线衍射分析表明,在Tr = 550°C退火的薄膜很好地由Sb_2O_4正交相组成,元素的取向优选为(004)方向。同样,从光透射率T(λ)和反射率R(λ)曲线来看,对这些薄膜的吸收系数与入射能的关系研究表明,Sb_2O_4氧化物的带隙能的值约为3.9 eV。机械和光热原始研究证实了与制造层退火温度相关的增强。

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