• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Journal of the Korean Physical Society >Effects of Growth Temperature on the Structural and the Optical Propertieof ZnO Thin Films on Porous Silicon Grown by Using Plasma-assistedMolecular Beam Epitaxy
【24h】

Effects of Growth Temperature on the Structural and the Optical Propertieof ZnO Thin Films on Porous Silicon Grown by Using Plasma-assistedMolecular Beam Epitaxy

机译：生长温度对等离子体辅助分子束外延生长多孔硅上ZnO薄膜结构和光学性能的影响

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

Zinc oxide (ZnO) thin films were grown on Si and porous silicon (PS) at different growth tempera-tures in the range from 150 to 550 °C by using plasma-assisted molecular beam epitaxy (PA-MBE). The effects of PS and growth temperature on the structural and the optical properties of the ZnO thin films were investigated by using atomic force microscopy (AFM), scanning electron microscopy (SEM), X-ray diffraction (XRD), and photoluminescence (PL). A higher intensity and a narrower full width at half maximum (FWHM) of the ZnO (002) diffraction peak were observed from the ZnO thin films grown on PS, indicating improved crystal quality. For the ZnO thin films grown on Si, the optical properties were gradually enhanced as the growth temperature was increased. However, the structural and the optical properties of the ZnO thin films grown on PS exhibited the largest improvement at a growth temperature of 350 °C. The structural and the optical properties of the ZnO thin films, compared with the ZnO thin films grown on Si, were improved by introducing PS, and the optimum growth temperature was decreased.
机译：通过使用等离子体辅助分子束外延（PA-MBE），在150至550°C的不同生长温度下，在硅和多孔硅（PS）上生长氧化锌（ZnO）薄膜。通过原子力显微镜（AFM），扫描电子显微镜（SEM），X射线衍射（XRD）和光致发光（PL）研究了PS和生长温度对ZnO薄膜的结构和光学性质的影响。 。从在PS上生长的ZnO薄膜中观察到更高的强度和ZnO（002）衍射峰的半峰全宽（FWHM）较窄，表明晶体质量得到了改善。对于在Si上生长的ZnO薄膜，随着生长温度的升高，光学性能逐渐增强。但是，在350℃的生长温度下，在PS上生长的ZnO薄膜的结构和光学性能表现出最大的改善。与在Si上生长的ZnO薄膜相比，通过引入PS可以改善ZnO薄膜的结构和光学性能，并降低了最佳生长温度。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号