• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Nanotechnology >High resolution UV roll-to-roll nanoimprinting of resin moulds and subsequent replication via thermal nanoimprint lithography
【24h】

High resolution UV roll-to-roll nanoimprinting of resin moulds and subsequent replication via thermal nanoimprint lithography

机译：树脂模具的高分辨率UV卷对卷纳米压印，随后通过热纳米压印光刻复制

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

UV roll-to-roll nanoimprinting at high resolution is still a relatively unexplored field of study with far-reaching application potential. One enabling technology that is particularly worthy of attention is mass production of high resolution resin moulds via UV roll-to-roll nanoimprinting at such high throughput and low cost that they can be used only once and disposed of or recycled economically. Low cost, high resolution resin moulds can greatly improve the production cost profile for a number of applications in biomedicine, nanofluidics, data storage and electronics with relatively low unit values but which require one or more nanoscale lithography steps. In this report, UV roll-to-roll nanoimprinting was employed to fabricate high fidelity resin moulds with nanoscale as well as mixed micro- and nanoscale features down to 50nm feature diameter, at up to 120cm ~2 area and at 10m min ~1 throughput. UV roll-to-roll nanoimprinted resin moulds were subsequently segmented out, employed in a batch mode thermal nanoimprinting process, and characterized to study performance and demonstrate viability. The results show that high resolution mixed nanostructures can be faithfully replicated in PMMA on silicon substrates with minimal volumetric shrinkage. Process details and challenges specific to roll-to-roll fabrication of resin moulds are discussed at length, particularly with respect to the curvature uniformity of the imprint roller.
机译：高分辨率的UV卷对卷纳米压印技术仍是一个尚未开发的研究领域，具有广泛的应用潜力。特别值得一提的一项使能技术是通过UV卷对卷纳米压印以高产量和低成本大量生产高分辨率树脂模具，以至于它们只能使用一次并且可以经济地处置或回收。低成本，高分辨率的树脂模具可以大大提高生产成本曲线，从而可用于生物医学，纳米流体，数据存储和电子产品等具有相对较低单位价值但需要一个或多个纳米级光刻步骤的应用。在本报告中，采用了UV卷对卷纳米压印技术，以制造具有纳米级以及低至50nm特征直径，最大120cm〜2面积和10m min〜1产量的混合的微米级和纳米级特征的高保真树脂模具。 。随后将UV卷对卷纳米压印树脂模具分割出来，用于批处理模式的热纳米压印工艺，并对其特征进行研究以研究性能并证明其可行性。结果表明，高分辨率混合纳米结构可以在PMMA上忠实地复制到硅基板上，并且体积收缩率最小。详细讨论了树脂模具的卷对卷制造所特有的工艺细节和挑战，特别是关于压印辊的曲率均匀性。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号