Using the subspace identification technique, we identify a finite dimensional, dynamical model of a recently developed prototype of a thermally actuated deformable mirror (TADM). The main advantage of the identified model over the models described by partial differential equations is its low complexity and low dimensionality. Consequently, the identified model can be easily used for high-performance feedback or feed-forward control. The experimental results show good agreement between the dynamical response predicted by the model and the measured response of the TADM.
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