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Luminescence from ZnO nanoparticles/SiO2 fabricated by ion implantation and thermal oxidation

机译:离子注入和热氧化制备的ZnO纳米颗粒/ SiO2的发光

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Annealing temperature dependence of photoluminescence (PL) of SiO2 implanted with Zn+ ions of 60 keV to 1.0 x 10(17) ions/cm(2) is evaluated at room temperature. In as-implanted state, no PL is observed because implanted Zn atoms form Zn metallic nanoparticles (NPs). After the annealing in oxygen gas at 700 degrees C for 1h, most of Zn NPs transform to ZnO NPs. A strong exciton PL line is observed at 375 nm, in addition to the defect band centered at similar to 500 nm. After the oxygen annealing at 800 degrees C for 1h, the defect band and the exciton line become much stronger and much weaker, respectively. After the oxygen annealing at 900 degrees C for 1h, ZnO NPs transform to Zn2SiO4 phase. From thermodynamics consideration, the increase of the defect PL band after the 800 degrees C annealing is ascribed to defect formation via partial transformation of ZnO NPs to Zn2SiO4 phase. (c) 2005 Elsevier B.V. All rights reserved.
机译:在室温下评估注入60 keV的Zn +离子至1.0 x 10(17)离子/ cm(2)的SiO2的光致发光(PL)的退火温度依赖性。在植入状态下,未观察到PL,因为植入的Zn原子形成Zn金属纳米颗粒(NPs)。在氧气中于700摄氏度下退火1小时后,大多数Zn NP转化为ZnO NP。除了缺陷带的​​中心类似于500 nm之外,在375 nm处还观察到了强激子PL线。氧气在800摄氏度下退火1小时后,缺陷带和激子线分别变得更强和更弱。氧气在900摄氏度下退火1小时后,ZnO NPs转变为Zn2SiO4相。从热力学的角度来看,800℃退火后缺陷PL带的增加归因于通过ZnO NPs部分转化为Zn2SiO4相形成缺陷。 (c)2005 Elsevier B.V.保留所有权利。

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