AbstractThis paper is a review of studies carried out by the staff of the National Research University of Information Technologies,'/> Laser technologies in micro-optics. Part 1. Fabrication of diffractive optical elements and photomasks with amplitude transmission
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Laser technologies in micro-optics. Part 1. Fabrication of diffractive optical elements and photomasks with amplitude transmission

机译：微光学激光技术。 第1部分。衍射光学元件和具有幅度传输的光掩模的制造

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AbstractThis paper is a review of studies carried out by the staff of the National Research University of Information Technologies, Mechanics and Optics (ITMO University, Saint-Petersburg) and the Institute of Automation and Electrometry of the Siberian Branch of the Russian Academy of Sciences (IAE SB RAS, Novosibirsk) in the field of development of laser engineering processes for the formation of the structure of diffractive optical elements (DOEs) and photomasks with amplitude binary and grayscale transmission. This paper also describes the results of the study of laser thermochemical technology for fabricating chrome DOEs and technologies for the fabrication of grayscale DOEs and photomasks based on the use of amorphous silicon and LDW glass.]]>
机译：<！[cdata [ <标题>抽象 ara>本文是由国家研究大学的工作人员进行的研究审查， 力学与光学（ITMO大学，圣彼得堡）和俄罗斯科学院西伯利亚分公司的自动化和电气测定研究所（IAE SB RAS，NovoIsibirsk）在模板形成的激光工程过程领域 具有幅度二进制和灰度传输的衍射光学元件（DO）和光掩模。 本文还描述了对制造镀铬技术的激光热化学技术研究以及基于使用非晶硅和LDW玻璃的灰度作用和光掩模的技术的研究结果。 ]]>

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