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首页> 外文期刊>Journal of surface investigation: x-ray, synchrotron and neutron techniques >Estimation of the Diameter of a SEM Beam by Video-Signal Curves from a Trapezoidal Structure: 2. Experiment
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Estimation of the Diameter of a SEM Beam by Video-Signal Curves from a Trapezoidal Structure: 2. Experiment

机译：通过梯形结构的视频信号曲线估计SEM光束的直径：2.实验

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摘要

The main sources of systematic error in measurements of SEM-beam diameter are revealed. The reasons for the occurrence of error in measurements using a relief structure with a trapezoidal profile are studied. One of the most important causes of the error is selection of the ratio between the height of the relief structure and the focal depth of the SEM; another cause is related to the modification of raw SEM images of the structure, measured in the form of a video-signal curve, necessary for the used method of measurement of the beam diameter. These can lead to systematic errors in the hundreds of (and even up to a thousand) percent. Most of the other causes of error occur at the stage of the formation of a beam of electrons emitted by the surface of the structure and forming the video signal. These errors arise due to imperfection of the calculation model of low-energy secondary electron emission near the edge of the structure and some significant quantities of edge variation due to poor technological reproducibility. The contribution of these sources to the relative error was approximately 100%. Ways of eliminating the systematic error are proposed.
机译：揭示了SEM梁直径测量中系统误差的主要来源。研究了使用具有梯形轮廓的浮雕结构的测量误差发生的原因。误差最重要的原因之一是选择浮雕结构高度与SEM的焦深的比率;另一种原因与用于射线直径的使用方法的视频信号曲线的形式测量的结构的RAW SEM图像的修改有关。这些可能导致数百（甚至高达千分之一）的系统错误。误差的大多数原因发生在由结构表面发射的电子束的形成阶段并且形成视频信号。由于在结构边缘附近的低能量二次电子发射的计算模型以及由于技术再现性差而导致的一些显着数量的边缘变化，因此出现了这些误差。这些来源对相对误差的贡献约为100％。提出了消除系统误差的方法。

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