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首页> 外文期刊>Boletin de la Sociedad Espanola de Ceramica y Vidrio >Influence of thermal treatment on the crystallization and roughness of LinbO_3 thin films deposited by a spin coating method
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Influence of thermal treatment on the crystallization and roughness of LinbO_3 thin films deposited by a spin coating method

机译：热处理对旋涂法沉积的LinbO_3薄膜结晶和粗糙度的影响

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摘要

Lithium niobate (LiNbO_3) thin films with 1/1 stoichiometry were prepared by a spin-coating from polymeric precursor method. The films deposited on silicon (100) substrates, were thermally treated from 400 deg to 600 deg C for 3 hours in order to study the influence of thermal treatment on the crystallinity, microstructure, grain size and roughness. X-ray diffraction (XRD) results showed that LiNbO_3 phase crystallizes at low temperature (400 deg C). It was observed by scanning electron microscopy (SEM) that it is possible to obtain dense thin films at temperatures around 500 deg C. The atomic force microscopy (AFM) results showed that the grain size and roughness are strongly influenced by the annealing temperature.
机译：通过旋涂法从聚合物前驱体方法制备化学计量比为1/1的铌酸锂（LiNbO_3）薄膜。为了研究热处理对结晶度，微观结构，晶粒尺寸和粗糙度的影响，将沉积在硅（100）衬底上的薄膜在400摄氏度至600摄氏度之间进行了3个小时的热处理。 X射线衍射（XRD）结果表明，LiNbO_3相在低温（400℃）下结晶。通过扫描电子显微镜（SEM）观察到，可以在约500℃的温度下获得致密的薄膜。原子力显微镜（AFM）的结果表明，退火温度对晶粒尺寸和粗糙度有很大的影响。

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