Properties of TiOx films prepared by electron-beam evaporation of titanium and titanium suboxides

Waibel F.; Ritter E.; Linsbod R.

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Properties of TiOx films prepared by electron-beam evaporation of titanium and titanium suboxides

机译：通过电子束蒸发钛和低价钛氧化物制备的TiOx膜的性能

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The titanium suboxides TiO, Ti2O3, and Ti3O5 are widely used to produce films of titanium dioxide by reactive evaporation. If they are evaporated in high vacuum, however, they yield absorbing TiO. films with a transmission color varying between blue and gray. We investigated the specific properties of these TiOx films. TiO, Ti2O3, Ti3O5, and titanium metal were evaporated in high vacuum upon glass substrates at 25degrees and 250 degreesC. Differences in chemical composition, transmission and reflection, color, stress, and abrasion resistance of these films, depending on the starting material and the substrate temperature, were evaluated. (C) 2003 Optical Society of America. [References: 10]

机译：二氧化钛TiO，Ti2O3和Ti3O5广泛用于通过反应蒸发生产二氧化钛薄膜。但是，如果在高真空下将其蒸发，则会产生吸收性TiO。透射色在蓝色和灰色之间变化的胶片。我们研究了这些TiOx薄膜的特殊性能。 TiO，Ti2O3，Ti3O5和钛金属在25°C和250°C的高真空下在玻璃基板上蒸发。根据起始材料和基材温度，评估了这些薄膜的化学组成，透射和反射，颜色，应力和耐磨性的差异。（C）2003年美国眼镜学会。 [参考：10]

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《Applied optics》 |2003年第22期|共4页
作者
Waibel F.; Ritter E.; Linsbod R.;
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正文语种 eng
中图分类光学;
关键词
Reactive evaporation; Oxide films;

机译：反应蒸发;氧化膜;

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1. Properties of TiOx films prepared by electron-beam evaporation of titanium and titanium suboxides [J] . Waibel F., Ritter E., Linsbod R. Applied optics . 2003,第22期

机译：通过电子束蒸发钛和低价钛氧化物制备的TiOx膜的性能
2. Properties of TiO_(x) films prepared by electron-beam evaporation of titanium and titanium suboxides [J] . Applied optics . 2003,第22期

机译：钛和低价钛氧化物电子束蒸发制备的TiO_（x）薄膜的性能
3. Properties of titanium dioxide films prepared by reactive electron-beam evaporation from various starting materials [J] . Selhofer H., Ritter E., Linsbod R. Applied optics . 2002,第4期

机译：通过各种原料的反应性电子束蒸发制备的二氧化钛薄膜的性能
4. Properties of ceramic coatings prepared by HVOF and plasma spraying of titanium suboxide powders [C] . P. Vuoristo, A. Maatta, T. Mantyla, International Thermal Spray Conference . 2001

机译：通过HVOF制备的陶瓷涂层的性质和钛氧化钛粉末的血浆喷涂
5. Microstructure and properties of zirconium-rich lead(zirconium(x)titanium(1-x))oxygen(3) thin films prepared by metallo-organic deposition (MOD) technique. [D] . Huang, Jie. 1997

机译：金属有机沉积（MOD）技术制备的富锆的铅（x（x）钛（1-x））氧（3）薄膜的微观结构和性能。
6. Dataset for TiN Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition Using Tetrakis(dimethylamino)titanium (TDMAT) and Titanium Tetrachloride (TiCl4) Precursor [O] . Woo-Jae Lee, Eun-Young Yun, Han-Bo-Ram Lee, 2020

机译：通过等离子体增强的原子层沉积使用四甲基（二甲基氨基）钛（TDMAT）和四氯化钛（TiCl4）前体制备的锡薄膜的数据集
7. Comparison of optical properties of TiO₂ thin films prepared by reactive magnetron sputtering and electron-beam evaporation techniques [O] . Brus V.V., Kovalyuk Z.D., Parfenyuk O.A., 2011

机译：反应磁控溅射和电子束蒸发技术制备的TiO 2薄膜的光学性能比较
8. Formation and Characterization of Titanium Nitride and Titanium Carbide Films Prepared by Reactive Sputtering [R] . Sundgren, J. E. 1982

机译：反应溅射制备氮化钛和碳化钛薄膜的形成与表征

Properties of TiOx films prepared by electron-beam evaporation of titanium and titanium suboxides

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