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The fabrication of highly ordered silver nanodot patterns by platinum assisted nanoimprint lithography

机译:通过铂辅助纳米压印光刻技术制造高度有序的银纳米点图案

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摘要

Silver has been widely used for optical sensing and imaging applications which benefit from localized surface plasmon resonance (LSPR) in a nanoscale configuration. Many attempts have been made to fabricate and control silver nanostructures in order to improve the high performance in sensing and other applications. However, a fatal mechanical weakness of silver and a lack of durability in oxygen-rich conditions have disrupted the manufacturing of reproducible nanostructures by the top-down lithography approach. In this study, we suggest a steady fabrication strategy to obtain highly ordered silver nanopatterns that are able to provide tunable LSPR characteristics. By using a protecting layer of platinum on a silver surface in the lithography process, we successfully obtained large-area (2.7 × 2.7 mm~2) silver nanopatterns with high reproducibility. This large-area silver nanopattern was capable of enhancing the low concentration of a Cy3 fluorescence signal (~10-10 M) which was labeled with DNA oligomers.
机译:银已被广泛用于光学传感和成像应用,这得益于纳米级配置中的局部表面等离子体共振(LSPR)。为了提高感测和其他应用中的高性能,已经进行了许多尝试来制造和控制银纳米结构。然而,银的致命机械弱点和在富氧条件下缺乏耐用性已通过自上而下的光刻方法破坏了可再现纳米结构的制造。在这项研究中,我们建议一种稳定的制造策略来获得能够提供可调LSPR特性的高度有序的银纳米图案。通过在光刻过程中在银表面上使用铂的保护层,我们成功地获得了具有高重现性的大面积(2.7×2.7 mm〜2)银纳米图案。这种大面积的银纳米图案能够增强低浓度的Cy3荧光信号(〜10-10 M),该信号被DNA寡聚物标记。

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