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Cones fabricated by 3D nanoimprint lithography for highly sensitive surface enhanced Raman spectroscopy

机译:通过3D纳米压印光刻技术制造的锥体,用于高度敏感的表面增强拉曼光谱

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摘要

We demonstrated a cost-effective and deterministic method of patterning 3D cone arrays over a large area by using nanoimprint lithography(NIL). Cones with tip radius of less than 10nm were successfully duplicated onto the UV-curable imprint resist materials from the silicon cone templates. Such cone structures were shown to be a versatile platform for developing reliable, highly sensitive surface enhanced Raman spectroscopy(SERS) substrates. In contrast to the silicon nanocones, the SERS substrates based on the Au coated cones made by the NIL offered significant improvement of the SERS signal. A further improvement of the SERS signal was observed when the polymer cones were imprinted onto a reflective metallic mirror surface. A sub-zeptomole detection sensitivity for a model molecule, trans-1,2-bis(4-pyridyl)-ethylene(BPE), on the Au coated NIL cone surfaces was achieved.
机译:我们演示了使用纳米压印光刻(NIL)在大面积上构图3D圆锥阵列的经济高效且确定性的方法。从硅锥模板成功地将尖端半径小于10nm的圆锥复制到可紫外线固化的压印抗蚀剂材料上。这种圆锥结构被证明是开发可靠,高度敏感的表面增强拉曼光谱(SERS)基板的通用平台。与硅纳米锥相反,基于NIL制成的Au涂层锥体的SERS基板显着改善了SERS信号。当将聚合物锥体压印到反射金属镜面上时,观察到SERS信号的进一步改善。在Au涂层的NIL锥表面上获得了对模型分子反式1,2-双(4-吡啶基)-乙烯(BPE)的亚小tom子检测灵敏度。

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