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Fabrication of suspended, three-dimensional chiral plasmonic nanostructures with single-step electron-beam lithography

机译：单步电子束光刻技术制备悬浮的三维手性等离子体纳米结构

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Recent years have witnessed explosive development of chiral plasmonics due to the fact that chiral plasmonic nanostructures give rise to broadband and scalable chiroptical effects orders of magnitude larger than naturally occurring materials. Various chiral plasmonic nanostructures have been demonstrated based on top-down and bottom-up fabrication techniques. However, three-dimensional (3D) chiral plasmonic nanostructure fabrication still remains challenging in many aspects. Here, we demonstrate suspended 3D chiral plasmonic nanostructures fabricated with only one-step electron-beam lithography. Our approach is unique since no alignment is required in the fabrication processes and the top and the bottom structures are self-aligned. Our 3D chiral plasmonic nanostructure consists of a suspended ultrathin silicon nitride membrane with perfectly-aligned L-shape and disk-shape gold nanostructures on its two respective sides. Such suspended chiral plasmonic nanostructures possess strong chiroptical properties at optical frequencies, which can be engineered by simply changing the disk size on one side of the membrane. The origin of the chiroptical properties is also analyzed using the plasmon hybridization model. Experimental results are in good agreement with the finite-difference time-domain simulations. Such suspended chiral plasmonic nanostructures could be highly applicable for chirality analysis of biomolecules, drugs, and chemicals.
机译：近年来，由于手性等离子体纳米结构产生的宽带效应和可伸缩的手性效应比天然存在的材料大几个数量级，因此手性等离子体的爆炸性发展。基于自上而下和自下而上的制造技术，已经证明了各种手性等离子体纳米结构。然而，在许多方面，三维（3D）手性等离子体纳米结构的制造仍然具有挑战性。在这里，我们演示了仅一步电子束光刻制造的悬浮3D手性等离子体纳米结构。我们的方法是独特的，因为在制造过程中不需要对齐，并且顶部和底部结构是自动对齐的。我们的3D手性等离子体纳米结构由悬浮的超薄氮化硅膜组成，在其两侧分别具有完美对齐的L形和盘形金纳米结构。这种悬浮的手性等离子体纳米结构在光学频率上具有很强的手性，可以通过简单地改变膜的一侧上的盘大小来进行工程设计。还使用等离子体激元杂交模型分析了手性性质的起源。实验结果与时域有限差分仿真结果吻合良好。这种悬浮的手性等离子体纳米结构可以高度适用于生物分子，药物和化学物质的手性分析。

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