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Analysis of the shortcomings of the Matthews-Blakeslee theory of critical thickness at higher strains

机译:分析高应变下的临界厚度的Matthews-Blakeslee理论的缺点

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摘要

The Matthews-Blakeslee equilibrium theory provides predictions of the critical thickness of a strained heteroepitaxial layer as a function of misfit strain and material constants. At low strains the prediction is double valued with one value producing a physically reasonable result for the critical thickness. At higher strains, no prediction is provided at all. It is shown that these features arise from a particular approximation which increases in importance for larger strains and hence for reduced critical layer thickness. A correction is proposed which lessens the influence of this approximation and which provides a single-valued prediction for all layer thicknesses, thus extending the useful range of applicability of the Matthews-Blakeslee theory.
机译:Matthews-Blakeslee平衡理论提供了应变异质外延层的临界厚度随失配应变和材料常数变化的预测。在低应变下,对预测值进行双值处理,其中一个值会为临界厚度提供物理上合理的结果。在较高的应变下,根本没有提供任何预测。可以看出,这些特征来自特定的近似,对于较大的应变并因此对于减小的临界层厚度而言,其重要性增加。提出了一种校正方法,该方法可减轻这种近似的影响,并为所有层的厚度提供单值预测,从而扩展了Matthews-Blakeslee理论的适用范围。

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