A Packaged Silicon MEMS Vibratory Gyroscope for Microspacecraft

机译：用于微空间飞行器的封装硅mEms振动陀螺仪

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In this paper, we present recent work on the design, fabrication, and packaging of a silicon MIcro-Electro-Mechanical System (MEMS) microgyroscope designed for space applications. A hermetically sealed package that houses the microgyroscope and most of its control electronics has been built and tested.

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Tang, T. K.; Gutierrez, R. C.; Stell, C. B.; Vorperian, V.; Arakaki, G. A.; Rice, J. T.; Li, W. J.; Chakraborty, I.; Shceglov, K.; Wilcox, J. Z.; Kaiser, W. J.;
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年度 1997
页码 1-6
总页数 6
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
ATTITUDE CONTROL; ELECTROMECHANICS; FABRICATION; GYROSCOPES; MICROELECTROMECHANICAL SYSTEMS; PACKAGING; SILICON; TECHNOLOGY UTILIZATION; VIBRATION; MEMS micro-electromechanical system microspacecraft attitude control;

机译：态度控制;机电;制造;陀螺仪;微电子机械系统;打包;硅;技术利用;振动; mEms微机电系统微空间机器姿态控制;

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专利

1. Research on Laser Trimming of Silicon MEMS Vibratory Gyroscopes [J] . XIAOGUANG ZHAO, BIN ZHOU, RONG ZHANG Integrated Ferroelectrics . 2011,第Null期

机译：硅MEMS振动陀螺仪激光微调研究
2. Research on Laser Trimming of Silicon MEMS Vibratory Gyroscopes [J] . Xiaoguang Zhaoa Bin Zhoua Rong Zhanga, Zhiyong Chena Integrated Ferroelectrics: An International Journal . 2011,第1期

机译：硅MEMS振动陀螺仪激光微调研究
3. Linear parametric amplification/attenuation for MEMS vibratory gyroscopes based on triangular area-varying capacitors [J] . Journal of Micromechanics and Microengineering . 2020,第4期

机译：基于三角形区域改变电容器的MEMS振动陀螺仪的线性参数放大/衰减
4. A packaged silicon MEMS vibratory gyroscope for microspacecraft [C] . Tang, T.K., Gutierrez, . 1997

机译：用于微型航天器的封装硅MEMS振动陀螺仪
5. Investigation of factors affecting bias stability and scale factor drifts in Coriolis vibratory MEMS gyroscopes. [D] . Trusov, Alexander A. 2009

机译：在科里奥利振动MEMS陀螺仪中研究影响偏置稳定性和比例因子漂移的因素。
6. A Real-Time Circuit Phase Delay Correction System for MEMS Vibratory Gyroscopes [O] . Pengfei Xu, Zhenyu Wei, Zhiyu Guo, 2021

机译：MEMS振动陀螺仪的实时电路相位延迟校正系统
7. An Ultrahigh Vacuum Packaging Process Demonstrating Over 2 Million Q-Factor in MEMS Vibratory Gyroscopes [O] . Mohammad H. Asadian, Sina Askari, Andrei M. Shkel 2017

机译：超高真空包装工艺，在MEMS振动陀螺仪中展示了超过200万Q因子

A Packaged Silicon MEMS Vibratory Gyroscope for Microspacecraft

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