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DEVICE FOR CALCULATING CD OF OPTIMAL MODEL BASED ON CONTROL RANDOM SEARCH AND METHOD FOR IMPLEMENTING SAME
DEVICE FOR CALCULATING CD OF OPTIMAL MODEL BASED ON CONTROL RANDOM SEARCH AND METHOD FOR IMPLEMENTING SAME
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机译：基于控制随机搜索的最优模型CD计算装置及实现方法
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摘要
The present invention relates to a device for calculating a CD of an optimal model based on a control random search and a method for implementing the same. According to one embodiment of the present invention, the device comprises: a spectrum input unit configured to receive a measurement spectrum measured for each wavelength from a semiconductor device; a library unit configured to store sample data for calculating a test spectrum for comparison with the measurement spectrum; a controller including a simplex algorithm execution unit and a differential evolution (DE) algorithm execution unit, configured to control the library unit to calculate a test spectrum corresponding to sample data calculated from any one of the two algorithm execution units, and configured to repeat a process of calculating sample data for minimizing a difference by comparing the measurement spectrum with the test spectrum; and an output unit configured to output the sample data calculated by the controller and having a minimum difference of the test spectrum.;COPYRIGHT KIPO 2020
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