首页> 外文会议>18th Symposium on Microelectronics Technology and Devices; 16th Symposium on Integrated Circuits and System Design; Sep 8-11, 2003; Sao Paulo, Brazil >STUDY OF SERIES RESISTANCE AND EFFECTIVE CHANNEL LENGTH BEHAVIOR COMPARING GRADED-CHANNEL AND CONVENTIONAL SOI nMOSFETs
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STUDY OF SERIES RESISTANCE AND EFFECTIVE CHANNEL LENGTH BEHAVIOR COMPARING GRADED-CHANNEL AND CONVENTIONAL SOI nMOSFETs

机译:梯度沟道和常规SOI nMOSFET的串联电阻和有效沟道长度行为的研究

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摘要

This work analyzes the extraction of series resistance and effective channel length in Graded-Channel and conventional SOI nMOSFETs devices using two-dimensional simulations. The results showed that series resistance in conventional SOI device is smaller than in Graded-Channel SOI, while the total resistance presents larger values. These results also show that the difference between the mask and effective channel length obtained in GC SOI is close to the low doped region length (L_(LD)).
机译:这项工作使用二维仿真分析了梯度沟道和传统SOI nMOSFET器件中的串联电阻和有效沟道长度的提取。结果表明,传统SOI器件的串联电阻要小于渐变沟道SOI,而总电阻则呈现较大的值。这些结果还表明,GC SOI中获得的掩模与有效沟道长度之间的差异接近于低掺杂区长度(L_(LD))。

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