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Dependence of switching waveform on charge imbalance in superjunction MOSFET used in inductive load circuit

机译:开关波形对电感负载电路中使用的超结MOSFET中电荷不平衡的依赖性

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The switching waveform of superjunction (SJ) Si-MOSFETs used in inductive load circuit was investigated. At the turn-off phase, a hump appears in the drain current. Both experiment and simulation indicated that the amplitude of the current hump drastically depends on the charge imbalance (CIB). On the other hand, at the turn-on phase, calculation showed that the dependence of di/dt on CIB is opposite in the cases of planar or trench gate structure. These changes of switching waveform are caused by the electrostatic potential distribution around the gate structure. Based on the analysis we propose non-sensitive to CIB device structures in this paper.
机译:研究了用于电感负载电路的超结(SJ)Si-MOSFET的开关波形。在关断阶段,漏极电流出现驼峰。实验和仿真均表明,电流驼峰的幅度极大地取决于电荷不平衡(CIB)。另一方面,在导通阶段,计算表明,在平面或沟槽栅极结构的情况下,di / dt对CIB的依赖性相反。开关波形的这些变化是由栅极结构周围的静电势分布引起的。在此基础上,我们提出了对CIB设备结构不敏感的建议。

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