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Dependence of switching waveform on charge imbalance in superjunction MOSFET used in inductive load circuit

机译:电感负载电路超结MOSFET中电荷不平衡的切换波形的依赖性

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The switching waveform of superjunction (SJ) Si-MOSFETs used in inductive load circuit was investigated. At the turn-off phase, a hump appears in the drain current. Both experiment and simulation indicated that the amplitude of the current hump drastically depends on the charge imbalance (CIB). On the other hand, at the turn-on phase, calculation showed that the dependence of di/dt on CIB is opposite in the cases of planar or trench gate structure. These changes of switching waveform are caused by the electrostatic potential distribution around the gate structure. Based on the analysis we propose non-sensitive to CIB device structures in this paper.
机译:研究了在电感负载电路中使用的超结(SJ)Si-MOSFET的开关波形。在关闭阶段,漏极电流中出现驼峰。实验和仿真都表明电流驼峰的幅度急剧上取决于电荷不平衡(CIB)。另一方面,在开启阶段,计算表明DI / DT对CIB上的依赖性在平面或沟槽栅极结构的情况下是相对的。切换波形的这些变化是由栅极结构周围的静电电位分布引起的。基于分析,我们提出了本文对CIB器件结构的非敏感性。

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