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A new 1200 V-class edge termination structure with trench double field plates for high dV/dt performance

机译:具有沟槽双场板的新型1200 V级边缘终端结构,可实现高dV / dt性能

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摘要

In this paper, a new 1200 V-class edge termination structure with trench double field plates is proposed and experimentally demonstrated. The double field plates are buried inside the trench. One of the field plates is for modulating electric field distributions along the trench and shifting the breakdown point to the active region for achieving the ideal planar junction breakdown voltage, and the other one is for stopping the depletion region extension at the right side of the trench to achieve high dV/dt performance. The fabricated device has a breakdown voltage of 1422 V which is verified as the ideal planar junction breakdown voltage. Furthermore, it is with a record-short edge termination length of 78 μm which is less than one-fifth of conventional guard ring approaches. Besides, it can handle a high dV/dt value of 73 kV/μs even at a bus voltage of 1400 V.
机译:本文提出了一种具有沟槽双场板的新型1200 V级边缘终端结构,并进行了实验验证。双场板埋在沟槽内。场板之一用于调制沿沟槽的电场分布,并将击穿点移至有源区,以实现理想的平面结击穿电压,另一个用于终止耗尽区在沟槽右侧的扩展实现高dV / dt性能。所制造的器件具有1422 V的击穿电压,该击穿电压被验证为理想的平面结击穿电压。此外,它的记录短边缘终止长度为78μm,小于传统保护环方法的五分之一。此外,即使在总线电压为1400 V的情况下,它也可以处理73 kV /μs的高dV / dt值。

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  • 会议地点 Sapporo(JP)
  • 作者单位

    Department of Electronic and Computer Engineering, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong, China;

    Department of Electronic and Computer Engineering, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong, China;

    Department of Electronic and Computer Engineering, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong, China;

    Department of Electronic and Computer Engineering, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong, China;

    Fuji Electric Co., Ltd, 4-18-1 Tsukama, Matsumoto, Nagano 390-0821, Japan;

    Fuji Electric Co., Ltd, 4-18-1 Tsukama, Matsumoto, Nagano 390-0821, Japan;

    Fuji Electric Co., Ltd, 4-18-1 Tsukama, Matsumoto, Nagano 390-0821, Japan;

    Department of Electronic and Computer Engineering, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong, China;

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  • 正文语种 eng
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