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首页> 外文会议>8th International conference on commercialization of micro and nano systems (COMS 2003) >COMMERCIALIZATION OF SU-8 POLYMER MEMS
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COMMERCIALIZATION OF SU-8 POLYMER MEMS

机译：SU-8聚合物MEMS的商业化

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The use of SU-8 polymer resists within the MEMS field has been growing exponentially over the last few years. SU-8's images are the product of photochemical and thermal cationic processes and result in structures with vertical sidewalls and high aspect ratio features in films of only a few microns in thickness or hundreds of microns in thickness. When crosslinked it forms a highly stable, chemically resistant polymeric structure which has found a wide range of utility in the MEMS area. Its high aspect ratio features have been used to form electroplated metal parts, micromolds for injection molding, masters for hot embossing, and molds to form polydimethylsiloxane (PDMS) structures for bioMEMS applications. Its chemical resistance has been used to advantage for use in microchannels, ink jet components and microarrays for bio analysis and more recently because of its structural integrity it has found utility in various sensors and actuators such as AFM cantilevers, integrated strain sensor elements and as integrated waveguides for bio separation and analysis.rnHowever, in many of these more permanent applications SU-8 is a new material and has yet to be proven in its long term utility. Whether it is its solvent resistance, its structural integrity over time, its biocompatibility, or its resistance to yellowing, each application has real world requirements which must be demonstrated and proven before commercial viability can be ascertained. In some cases the resulting structure can be expected to meet the final requirements, but in other cases it is anticipated that modifications will be needed to reach the final goal. In such cases these modifications still need to be developed, tested and proven. However, there is a great deal of inertia already generated with SU-8 polymer MEMS that one can expect to see more commercialization successes and new applications developed in the near future.
机译：在过去的几年中，SU-8聚合物抗蚀剂在MEMS领域的使用呈指数增长。 SU-8的图像是光化学和热阳离子过程的产物，在厚度仅为几微米或几百微米的薄膜中形成具有垂直侧壁和高纵横比特征的结构。当交联时，它形成了高度稳定的，耐化学腐蚀的聚合物结构，该结构在MEMS领域具有广泛的用途。它的高长宽比特征已被用于形成电镀金属零件，用于注塑的微模具，用于热压花的母版以及用于形成生物MEMS应用的聚二甲基硅氧烷（PDMS）结构的模具。它的耐化学性已被有利地用于生物分析的微通道，喷墨组件和微阵列中。最近，由于其结构的完整性，它已被广泛用于各种传感器和执行器，例如AFM悬臂，集成应变传感器元件以及集成然而，在许多更持久的应用中，SU-8是一种新材料，尚未得到长期使用的证明。无论是耐溶剂性，随时间变化的结构完整性，生物相容性还是耐黄变性，每种应用都有现实世界的要求，必须先证明和证明这些要求，才能确定商业可行性。在某些情况下，可以期望最终的结构满足最终要求，但在其他情况下，则需要进行修改才能达到最终目标。在这种情况下，仍然需要开发，测试和证明这些修改。然而，SU-8聚合物MEMS已经产生了许多惯性，人们可以期望在不久的将来看到更多的商业化成功和新的应用开发。

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