A novel baking technology using halogen lamps for higher precision photomask fabrication

机译：使用卤素灯的新型烘烤技术，可用于更高精度的光掩模制造

获取原文

获取原文并翻译 | 示例

页面导航

摘要
著录项
相似文献
相关主题

摘要

Heating performances of a lamp heater system using halogen lamps were investigated. Good heating performances were obtained for both Cr and half-tone mask even though there was a concern that the heating performances varied when the material of film differed. As a result of controlling the resist temperature with quick response, the temperature uniformity was not only improved but also overshooting of the temperature was reduced. It was possible to realize a different process temperature in each area because films were heated directly, and so the reaction amount of CAR during PEB that is including cooling process of substrate could be even in each pattern area on mask. In addition, this heating method does not influence quartz thickness, so the lamp heater system has the same performance for 9-inch substrate as 6-inch substrate.

机译：研究了使用卤素灯的灯加热器系统的加热性能。尽管人们担心当膜的材料不同时加热性能会发生变化，但对于Cr和半色调掩模都获得了良好的加热性能。通过快速响应地控制抗蚀剂温度，不仅提高了温度均匀性，还减少了温度的过冲。由于可以直接加热薄膜，因此可以在每个区域实现不同的处理温度，因此在PEB期间，包括基板冷却过程在内的CAR的反应量在掩模上的每个图案区域都可以均匀。另外，这种加热方法不影响石英厚度，因此灯加热器系统在9英寸基板上具有与6英寸基板相同的性能。

著录项

来源
《Conference on Photomask and Next-Generation Lithography Mask Technology IX, Apr 23-25, 2002, Yokohama, Japan》|2002年|p.274-281|共8页
会议地点 Yokohama(JP)
作者
Hideaki Sakurai; Masamitsu Itoh; Noboru Fujiwara; Satoshi Yasuda; Takiji Ishimura; Shigeru Wakayama; Shinichi Ito;
展开▼
作者单位

Process Manufacturing Engineering Center, Semiconductor Company, Toshiba Corporation 1 Komukai Toshiba-cho, Saiwai-ku, Kawasaki-city, Japan;

展开▼
会议组织
原文格式 PDF
正文语种 eng
中图分类无线电电子学、电信技术;
关键词

相似文献

外文文献
中文文献
专利

1. Characterization for the photomask fabrication based on a high-resolution technique with a non-chemically amplified resist and a post-exposure bake [J] . Miyoshi Hidetatsu, Taniguchi Jun Microelectronic Engineering . 2016,第Apra期

机译：基于高分辨率技术的光掩模制造的特性，该技术具有非化学放大的抗蚀剂和曝光后烘烤
2. Halogen lamp-microwave combination baking of cookies. [J] . Keskin S O, Ozturk S, Sahin S, European food research and technology =: Zeitschrift fur Lebensmittel-Untersuchung und -Forschung. A . 2005,第5a6期

机译：卤素灯-微波组合烘烤饼干。
3. Optimization of halogen lamp-microwave combination baking of cakes: a response surface methodology study. [J] . Sevimli K M, Sumnu G, Sahin S European food research and technology =: Zeitschrift fur Lebensmittel-Untersuchung und -Forschung. A . 2005,第1a2期

机译：蛋糕的卤素灯-微波组合烘焙的优化：响应面方法研究。
4. A novel baking technology using halogen lamps for higher precision photomask fabrication [C] . Hideaki Sakurai, Masamitsu Itoh, Noboru Fujiwara, Conference on photomask and next-generation lithography mask technology . 2002

机译：一种使用卤素灯的新型烘焙技术，用于更高的精密光掩模制造
5. Non-contact critical dimension metrology sensor for chrome photomasks implemented using a low-temperature co-fired ceramic technology. [D] . Guillaume, Nadine Marie-Pierre. 2002

机译：用于铬光掩模的非接触式临界尺寸计量传感器，采用低温共烧陶瓷技术实现。
6. An improved objective slit-lamp fluorophotometer using tungsten-halogen lamp excitation and synchronous detection. [O] . A T Smith, D P Jones, G D Sturrock, 1977

机译：一种改进的物镜裂隙灯荧光分光光度计采用钨卤灯激发和同步检测。
7. Fabrication of Moulds and Dies Using Precision Laser Micromachining and Micromilling Technologies [O] . Evgueni Bordatchev, Suwas Nikumb 2015

机译：使用精密激光微加工和微细加工技术制造模具和模具
8. Manufacturing Methods and Technology (MMTE) Measure for Fabrication of Low Voltage Start Sealed Beam Arc Lamps. [R] . roberts,roy bell, tim 1978

机译：制造方法和技术（mmTE）测量低压启动密封束弧光灯的制造。

A novel baking technology using halogen lamps for higher precision photomask fabrication

摘要

著录项

相似文献

相关主题

期刊订阅