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首页> 外文会议>International Conference on Mechanical Engineering and Mechanics vol.2; 20051026-28; Nanjing(CN) >Investigation on VCA Direct-drive XY Table for MEMS Packaging
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Investigation on VCA Direct-drive XY Table for MEMS Packaging

机译：用于MEMS封装的VCA直接驱动XY工作台的研究

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摘要

In order to develop a high speed and high precision positioning table for MEMS, a voice coil actuator direct-drive high speed and high precision XY table is presented, and a novel flexible decoupling mechanism is used in the XY table. So the driving element of the XY table can be mounted on the base and the moving inertia has been reduced, the dynamic performance of the XY table has been improved. Meanwhile, the table is of conventional XY precision table kinematics decoupling characteristic. Considering the precision positioning table as lumped mass spring system, the dynamic model of X axial table and Y axial table has been developed respectively. The voice coil actuator dynamic model together with the dynamic model of the mechanical system allows the transfer function of the system as a whole to be developed. The transfer function based on close control algorithm of the electromechanical coupling control system has been studied. And all constituent control components will be elaborated on in the paper. The above outcomes have been used for the development of a prototype machine of XY table. The prototype machine service test has been carried out, the experimental results show that the XY table prototype is of high positioning accuracy and high dynamic performance, and can also achieve very high speed and acceleration.
机译：为了开发一种用于MEMS的高速高精度定位台，提出了一种音圈致动器直驱式高速高精度XY台，并在XY台上采用了一种新型的柔性去耦机构。因此，可以将XY工作台的驱动元件安装在基座上，并减少了运动惯性，从而提高了XY工作台的动态性能。同时，该工作台具有常规的XY精密工作台运动解耦特性。以精密定位工作台为集中质量弹簧系统，分别建立了X轴工作台和Y轴工作台的动力学模型。音圈致动器动力学模型与机械系统的动力学模型一起，可以开发整个系统的传递函数。研究了机电耦合控制系统基于闭环控制算法的传递函数。并且所有构成控制组件将在本文中进行详细说明。以上结果已用于XY工作台样机的开发。进行了原型机维修测试，实验结果表明，XY工作台原型具有较高的定位精度和较高的动态性能，并且还可以实现很高的速度和加速度。

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