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Fundamentals of nitride-based superlattice thin films

机译:氮化物基超晶格薄膜的基本原理

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the structure and mechanical properties of superlattices have been studied since the 1960's.[1] The term "superlattice" in this case refers to any thin-film structure with a periodic composition modulation in the film growth direction.Superlattices are characterized by the distance between successive pair of layers,A,known as the 'bilayer repeat period'.In early work,Hilliard and co-workers used superlattices such as Ag/Cu for interdiffusion studies,where the nm-scale thicknesses allowed measurement of relative small diffusion coefficients.Early work also showed unusually large hardnesses in metallic superlattices.Interest in superlattice mechanical properties blossomed in the late 1970's,with the first report of the so-called supermodulus effect - an anomalously large (2-5 times) enhancement in elastic moduli for small composition-modulation periods #LAMBDA# approx2nm.however,most recent reports show only minor (approx approx 10
机译:自1960年代以来就研究了超晶格的结构和力学性能。[1]在这种情况下,术语“超晶格”是指在薄膜生长方向上具有周期性成分调制的任何薄膜结构。超晶格的特征在于连续的两对层之间的距离A,称为“双层重复周期”。早期的工作中,Hilliard及其同事使用银/铜等超晶格进行相互扩散研究,其中纳米级厚度允许测量相对较小的扩散系数。早期工作还显示出金属超晶格中的硬度异常大。在1970年代后期,首次报道了所谓的超模量效应-在较小的组成调制周期#LAMBDA#约2nm处,弹性模量异常大(2-5倍)增强。约10

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