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首页> 外文会议>International Congress on Applications of Lasers and Electro-Optics >FABRICATION, CHARACTERIZATION AND SIMULATION OF NOVAL 3-D PHOTONIC BANDGAP STRUCTURES USING LASER CHEMICAL VAPOR DEPOSITION
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FABRICATION, CHARACTERIZATION AND SIMULATION OF NOVAL 3-D PHOTONIC BANDGAP STRUCTURES USING LASER CHEMICAL VAPOR DEPOSITION

机译：基于激光化学气相沉积的Noval 3-D光子带隙结构的制造，表征和仿真

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Three-dimensional (3-D) photonic bandgap (PBG) structures were fabricated by laser chemical vapor deposition (LCVD) of silicon among self-assembled silica particles on silicon substrates. The multilayer self-assembly of colloidal silica particles were formed on silicon substrates using isothermal heating evaporation approach. A Nd:YAG laser (1064 nm wavelength) was used as the energy source for LCVD processing. A silica-silicon shell PBG structure was obtained. By removing silica particles embedded in the silicon using hydrofluoric acid, another air-silicon shell PBG was produced. This technique is capable of fabricating the complete PBG, which is predicted by theoretical calculations with the plan-wave method. This might enable us to engineer the position of PBG by flexibly varying the silica particle size. Ellipsometry was used to identify specific bandgaps at various crystal directions for both structures. The transmission matrix method is used to simulate the transmission spectra of the structures, which agree with the experimental results.
机译：通过在硅基衬底上的自组装二氧化硅颗粒中的硅的激光化学气相沉积（LCVD）制造了三维（3-D）光子带隙（PBG）结构。使用等温加热蒸发方法在硅基衬底上形成胶体二氧化硅颗粒的多层自组装。 ND：YAG激光（1064nm波长）用作LCVD加工的能源。获得二氧化硅硅壳PBG结构。通过使用氢氟酸除去嵌入硅中的二氧化硅颗粒，制备另一个空气硅壳PBG。该技术能够制造完整的PBG，其通过使用平面波方法的理论计算来预测。这可能使我们能够通过灵活地改变二氧化硅粒度来设计PBG的位置。椭圆测定法用于识别两个结构的各种晶体方向上的特定带隙。传输矩阵方法用于模拟结构的透射光谱，这与实验结果一致。

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