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Confocal operation in differential phase interference microscopy

机译:差分相干扰显微镜中的共焦操作

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This paper discusses the operation and imaging properties of various types of optical heterodyne interferometer. Conditions needed to achieve confocality in differential interference microscopes are considered. This leads to a novel extended focus phase imaging mode. Results are presented which demonstrate this mode of operation and show the ability of the technique to produce accurate phase measurement on samples with warp and tilt, over a range much greater than the depth of focus of the objective lens.
机译:本文讨论了各种类型的光学外差干涉仪的操作和成像性质。考虑在差异干扰显微镜中达到聚焦所需的条件。这导致了一种新的扩展聚焦相位成像模式。提出了结果,演示了这种操作模式,并显示了该技术在具有经纱和倾斜的样品上产生精确相位测量的能力,范围远大于物镜的焦点深度。

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