Thin Film Transistors in ULSI -Status and Future

机译：Ulsi -Status和未来中的薄膜晶体管

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The current status of the thin film transistor (TFT) in ULSI is reviewed.The problems and solutions are discussed.Possible future applications of TFTs to ULSI and related fields are examined.Nanosize TFTs are potential solutions for many current problems but create technical challenges for scientists and engineers.

机译：综述了ULSI中的薄膜晶体管（TFT）的当前状态。讨论了问题和解决方案。检查了TFT对ULSI和相关领域的未来应用.NANOSIZE TFT是许多当前问题的潜在解决方案，但为此产生了技术挑战科学家和工程师。

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《The Meeting of the Electrochemical Society》|2003年||共1页
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Yue Kuo;
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Thin Film Transistors in ULSI -Status and Future

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