Thin Film Transistors in ULSI -Status and Future

机译：ULSI中的薄膜晶体管-现状与未来

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The current status of applications of thin film transistors (TFTs) in ULSI is reviewed. Problems and solutions in areas of structures, materials, processes, and devices are discussed. Possible future applications of TFTs in ULSI and related fields are examined. Nano size TFTs are potential solutions for many current problems, but there are critical technical challenges for scientists and engineers.

机译：综述了ULSI中薄膜晶体管（TFT）的应用现状。讨论了结构，材料，过程和设备领域的问题和解决方案。研究了TFT在ULSI及其相关领域中可能的未来应用。纳米尺寸的TFT是解决许多当前问题的潜在解决方案，但是对于科学家和工程师来说，存在着严峻的技术挑战。

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《Electrochemical Society Meeting and International Symposium on ULSI Process Integration III; 20030428-20030502; Paris; FR》|2003年|P.322-329|共8页
会议地点 Paris(FR);Paris(FR)
作者
Yue Luo;
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作者单位

Thin Film Microelectronics Research Laboratory, 335-O Zachry Engineering Center, Texas AM University, College Station, TX 77843-3122, USA;

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原文格式 PDF
正文语种 eng
中图分类大规模集成电路、超大规模集成电路;
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Thin Film Transistors in ULSI -Status and Future

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