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首页> 外文会议>Conference on Metrology, Inspection, and Process Control for Microlithography >Application of Nano-tips to Cold Field Emission CD-SEM
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Application of Nano-tips to Cold Field Emission CD-SEM

机译：纳米提示在冷场发射CD-SEM中的应用

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Experimental nano-tips have shown significant improvements in the resolution performance of a cold field emission critical dimension metrology scanning electron microscope (CD-SEM). Nano-tip electron sources are very sharp electron emitter tips used as a replacement for the conventional tungsten field emission (FE) electron sources. Nano-tips offer higher brightness and smaller electron source size. An electron microscope equipped with nano-tip electron gun can provide images with higher spatial resolution and with better signal-to-noise ratio. This could present a considerable advantage over the current scanning electron microscope electron gun technology if the tips are sufficiently long-lasting and stable for practical use. In this study, an old cold field emission critical dimension CD-SEM was used as an experimental test platform. Substitution of tungsten nano-tips for the regular cathodes required modification of the electron gun circuitry, tip mounting and preparation of nano-tips that properly fit the electron gun assembly. The images taken with experimental nano-tips showed a minimum two-fold improvement in resolution performance than the specification of the test SEM. The lifetime and stability of the nano-tip electron gun was excellent, the tip stayed useful for high-resolution imaging during many days of tests without flashing. The tip lifetime was found to be over a year. This paper summarizes the current state of the work and points to future possibilities that will open when electron guns can be designed to fully take the advantage of the nano-tip electron emitters.
机译：实验纳米尖端显示了冷场发射临界尺寸计量扫描电子显微镜（CD-SEM）的分辨率性能的显着改进。纳米尖端电子源是非常尖锐的电子发射器尖端，用作传统钨场发射（Fe）电子源的替代品。纳米尖端提供更高的亮度和更小的电子源尺寸。配备有纳米尖端电子枪的电子显微镜可以提供具有更高空间分辨率和更好的信噪比的图像。如果尖端足够长且实际使用稳定，这可以在电流扫描电子显微镜电子枪技术上具有相当大的优势。在本研究中，使用旧的冷场发射临界尺寸CD-SEM作为实验测试平台。钨纳米提示的替换为常规阴极所需的电子枪电路改变，尖端安装和纳米尖端的制备能够适当地适合电子枪组件。用实验纳米提示拍摄的图像在分辨率性能下显示出比测试SEM的规格的分辨率最低改善。纳米尖端电子枪的寿命和稳定性优异，尖端在不闪烁的情况下在多天的测试期间保持高分辨率成像。发现尖端寿命超过一年。本文总结了当前的工作状态，指出了当电子枪可以设计为充分利用纳米尖端电子发射器的优势时将打开的未来可能性。

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